A novel piezo-driven nanopositioning mechanism for precise manipulating

Proceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007

Volumn , Issue , 2007, Pages 842-846

  Li, Ma ^a   Weibin, Rong ^a   Lining, Sun ^a  

^a HARBIN INSTITUTE OF TECHNOLOGY   (China)

Author keywords

Control; FEA; Hinges; Nanopositioning

Indexed keywords

FINITE ELEMENT METHOD; NANOTECHNOLOGY; NATURAL FREQUENCIES; POSITION CONTROL; TWO TERM CONTROL SYSTEMS;

NANOPOSITIONING; ROTATIONAL STIFFNESS; TRANSLATIONAL STIFFNESS;

PIEZOELECTRIC ACTUATORS;

EID: 34548126869     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/NEMS.2007.352149     Document Type: Conference Paper

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