Design and dynamics of a 3-DOF flexure-based parallel mechanism for micro/nano manipulation

Microelectronic Engineering

Volumn 87, Issue 2, 2010, Pages 230-241

  Tian, Y ^a,b   Shirinzadeh, B ^a   Zhang, D ^b  

^a MONASH UNIVERSITY   (Australia)

^b TIANJIN UNIVERSITY   (China)

Author keywords

Dynamics; Flexure hinge; Mechanical design; Micro nano manipulation

Indexed keywords

ACCURATE MOTION; ACTIVE LINKS; DOF (DEGREE OF FREEDOM); DYNAMIC PERFORMANCE; FINITE ELEMENT ANALYSIS; FLEXURE HINGE; FLEXURE-BASED MECHANISM; FLEXURE-BASED PARALLEL MECHANISM; INVERSE DYNAMICS; MECHANICAL DESIGN; MICRO/NANO MANIPULATION; NANOMETER LEVEL; REVOLUTE JOINTS; TORSIONAL STIFFNESS;

DEGREES OF FREEDOM (MECHANICS); HINGES; MECHANISMS; PIEZOELECTRIC ACTUATORS; VIBRATIONS (MECHANICAL);

MACHINE DESIGN;

EID: 70450253125     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2009.08.001     Document Type: Article

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