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Volumn 48, Issue 12, 2006, Pages 1401-1408

Investigation of a 3-DOF micro-positioning table for surface grinding

Author keywords

Micro positioning table; Piezoelectric actuator; Surface grinding

Indexed keywords

ACTUATORS; COMPUTER SIMULATION; DEGREES OF FREEDOM (MECHANICS); FINITE ELEMENT METHOD; NUMERICAL ANALYSIS; OPTIMIZATION; PIEZOELECTRIC DEVICES; SURFACE PROPERTIES;

EID: 33749252339     PISSN: 00207403     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ijmecsci.2006.07.006     Document Type: Article
Times cited : (71)

References (9)
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    • Gao, Y.1    Zhang, D.W.2    Yu, Ch.W.3
  • 2
    • 0030234630 scopus 로고    scopus 로고
    • A piezoelectrically driven micro-positioning system for the ductile-mode grinding of grinding materials
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  • 5
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    • Development of a micro displacement table for ultra-precision machining and grinding for curved surfaces by the use of it
    • Zhong Z., and Nakagawa T. Development of a micro displacement table for ultra-precision machining and grinding for curved surfaces by the use of it. International Journal of Japanese Society of Precision Engineering 6 2 (1992) 102-107
    • (1992) International Journal of Japanese Society of Precision Engineering , vol.6 , Issue.2 , pp. 102-107
    • Zhong, Z.1    Nakagawa, T.2
  • 6
    • 0025500828 scopus 로고
    • A piezoelectric-drive table and its application to micro-grinding of ceramic materials
    • K. Mizutani K., Kawano T., and Tanaka Y. A piezoelectric-drive table and its application to micro-grinding of ceramic materials. Precision Engineering 12 4 (1990) 219-226
    • (1990) Precision Engineering , vol.12 , Issue.4 , pp. 219-226
    • K. Mizutani, K.1    Kawano, T.2    Tanaka, Y.3
  • 8
    • 0032027808 scopus 로고    scopus 로고
    • Nanometre precision mechanisms
    • Atherton P.D. Nanometre precision mechanisms. Measurement and Control 31 (1998) 37-42
    • (1998) Measurement and Control , vol.31 , pp. 37-42
    • Atherton, P.D.1
  • 9
    • 0000112064 scopus 로고
    • How to design flexure hinges
    • Paros J.M., and Weisbord L. How to design flexure hinges. Machine Design 37 (1965) 151-156
    • (1965) Machine Design , vol.37 , pp. 151-156
    • Paros, J.M.1    Weisbord, L.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.