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Volumn 48, Issue 12, 2006, Pages 1401-1408
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Investigation of a 3-DOF micro-positioning table for surface grinding
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Author keywords
Micro positioning table; Piezoelectric actuator; Surface grinding
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Indexed keywords
ACTUATORS;
COMPUTER SIMULATION;
DEGREES OF FREEDOM (MECHANICS);
FINITE ELEMENT METHOD;
NUMERICAL ANALYSIS;
OPTIMIZATION;
PIEZOELECTRIC DEVICES;
SURFACE PROPERTIES;
CAPACITIVE SENSORS;
PIEZOELECTRIC ACTUATORS;
PRECISION GRINDERS;
SURFACE GRINDING;
GRINDING (MACHINING);
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EID: 33749252339
PISSN: 00207403
EISSN: None
Source Type: Journal
DOI: 10.1016/j.ijmecsci.2006.07.006 Document Type: Article |
Times cited : (71)
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References (9)
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