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Applied Physics Letters

Volumn 101, Issue 8, 2012, Pages

Contrast distortion induced by modulation voltage in scanning capacitance microscopy

(4) Chang, M N a Hu, C W a Chou, T H b Lee, Y J b

a NATIONAL CHUNG HSING UNIVERSITY (Taiwan)

b NATIONAL NANO DEVICE LABORATORIES (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRICAL JUNCTIONS; IMAGE CONTRASTS; MODULATION VOLTAGE; SCANNING CAPACITANCE MICROSCOPY; SIGNAL PHASE;

PHYSICAL PROPERTIES; PHYSICS;

CAPACITANCE;

EID: 84865482401 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.4747319 Document Type: Article

Times cited : (7)

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