SCOPUS 정보 검색 플랫폼

Volumn 105, Issue 9, 2009, Pages

Local mapping of interface traps in HfSiO/Si structure by scanning capacitance microscopy using dV/dC signal

Author keywords

[No Author keywords available]

Indexed keywords

BEFORE AND AFTER; INTERFACE TRAP DENSITY; INTERFACE TRAPS; LOCAL MAPPING; SCANNING CAPACITANCE MICROSCOPY; SPATIAL DISTRIBUTION; SPATIAL VARIATIONS;

CAPACITANCE; SCANNING;

SIZE DISTRIBUTION;

EID: 67249143035 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.3122597 Document Type: Article

Times cited : (7)

References (8)

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