Imaging mechanism and effects of adsorbed water in contact-type scanning capacitance microscopy

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 14, Issue 2, 1996, Pages 887-891

  Nakagiri, Nobuyuki ^a   Yamamoto, Takuma ^a   Sugimura, Hiroyuki ^a   Suzuki, Yoshihiko ^a  

^a NIKON CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000971570     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.589168     Document Type: Article

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