Observation of metal-oxide-semiconductor transistor operation using scanning capacitance microscopy

Applied Physics Letters

Volumn 75, Issue 15, 1999, Pages 2319-2321

  Nakakura, C Y ^a   Hetherington, D L ^a   Shaneyfelt, M R ^a   Shea, P J ^a   Erickson, A N ^b  

^a SANDIA NATIONAL LABORATORIES   (United States)

^b Digital Instruments   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000098772     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.125002     Document Type: Article

References (12)

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