|
Volumn 18, Issue 1, 2000, Pages 545-548
|
Effective channel length and base width measurements by scanning capacitance microscopy
a
CNR IMETEM
(Italy)
|
Author keywords
[No Author keywords available]
|
Indexed keywords
CAPACITANCE MEASUREMENT;
HETEROJUNCTION BIPOLAR TRANSISTORS;
MICROSCOPIC EXAMINATION;
MOS DEVICES;
SCANNING CAPACITANCE MICROSCOPY (SCM);
SEMICONDUCTOR DOPING;
|
EID: 0033712826
PISSN: 10711023
EISSN: None
Source Type: Journal
DOI: 10.1116/1.591229 Document Type: Article |
Times cited : (14)
|
References (3)
|