A roller embossing process for rapid fabrication of microlens arrays on glass substrates

Microsystem Technologies

Volumn 12, Issue 8, 2006, Pages 754-759

  Chang, C Y ^a   Yang, S Y ^a   Sheh, J L ^a  

^a NATIONAL TAIWAN UNIVERSITY   (Taiwan)

Author keywords

Hot embossing; Microlens array; Replication; Roller embossing; Ultraviolet embossing

Indexed keywords

ARRAYS; ELECTROFORMING; GLASS; NICKEL; ROLLERS (MACHINE COMPONENTS); SUBSTRATES; ULTRAVIOLET RADIATION;

HOT EMBOSSING; MICROLENS ARRAY; REPLICATION; ROLLER EMBOSSING; ULTRAVIOLET EMBOSSING;

HOT PRESSING;

EID: 33744538256     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-006-0103-5     Document Type: Article

References (14)

1. Becker H, Heim U (2000) Hot embossing as a method for the fabrication of polymer high aspect ratio structures. Sens Actuators 83:130-135
2. Chan-Park MB, Lam YC, Laulia P, Joshi SC (2005) Simulation and investigation of factors affecting high aspect ratio UV embossing. Langmuir 21:2000-2007
3. Chang JH, Yang SY (2003) Gas pressurized hot embossing for transcription of micro-features. Microsyst Technol 10:76-80
4. Chan-Park MB, Yan Y, Neo WK, Zhou W, Zhang J, Yue CY (2003) Fabrication of high aspect ratio poly(ethyleneglycol)-containing microstructures by UV embossing. Langmuir 19:4371-4380
5. Daly D, Stevens RF, Hutley MC, Davles N (1990) The manufacture of microlenses by melting photoresist. Meas Sci Technol 1:759-766
6. He M, Yuan XC, Ngo NQ, Bu J, Kudryashov V (2003) Simple reflow technique for fabrication of a microlens array in solgel glass. Opt Lett 28(9):731-733
7. Heckele M, Bacher W, Müller KD (1998) Hot embossing - the molding technique for plastic microstructures. Microsyst Technol 4:122-124
8. Lee BK, Kim DS, Kwon TH (2004) Replication of microlens arrays by injection molding. Microsyst Technol 10:531-535
9. Lin CP, Yang H, Chao CK. (2003) Hexagonal microlens array modeling and fabrication using a thermal reflow process. J Micromech Microeng 13:775-781
10. MacFarlane DL, Narayan V, Tatum JA, Cox WR, Chen T, Hayes DJ (1994) Microjet fabrication of microlens arrays. IEEE Photonics Technol Lett 6(9): 1112-1114
11. Naessens K, Ottevaere H, Van Daele P, Baets R (2003) Flexible fabrication of microlenses in polymer layers with excimer laser ablation. Appl Surf Sci 208-209:159-164
12. Ong NS, Koh YH, Fu YQ (2002) Microlens array produced using hot embossing process. Microelectron Eng 60:365-379
13. Peng Q, Guo Y, Liu S (2002) Real-time gray-scale photolithography for fabrication of continuous microstructure. Opt Lett 27(19): 1720-1722
14. Shan XC, Maeda R, Murakoshi Y (2003) Micro hot embossing for replication of microstructures. Jpn J Appl Phys 42:3859-3862