A sub-nanometric three-axis surface encoder with short-period planar gratings for stage motion measurement

Precision Engineering

Volumn 36, Issue 4, 2012, Pages 576-585

  Kimura, Akihide ^a   Gao, Wei ^a   Kim, Woojae ^a   Hosono, Koji ^a   Shimizu, Yuki ^a   Shi, Lei ^b   Zeng, Lijiang ^b  

^a TOHOKU UNIVERSITY   (Japan)

^b TSINGHUA UNIVERSITY   (China)

Author keywords

Interference; Planar grating; Stage motion; Sub nanometric; Surface encoder; Three axis displacement

Indexed keywords

DIFFRACTED BEAMS; GRATING STRUCTURES; INTERFERENCE SIGNAL; MOTION MEASUREMENTS; OPTICAL READING; PERIODIC GRATINGS; PLANAR GRATING; RECTANGULAR STRUCTURE; SCALE GRATING; SHORT PERIODS; SUB-NANOMETRIC; SURFACE ENCODERS; THREE-AXIS; TWO BEAMS;

DISPLACEMENT MEASUREMENT; MEASUREMENTS; OPTICAL SENSORS; PERIODIC STRUCTURES; POSITION MEASUREMENT; WAVE INTERFERENCE;

PLANERS;

EID: 84864290422     PISSN: 01416359     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.precisioneng.2012.04.005     Document Type: Article

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