A linear air bearing stage with active magnetic preloads for ultraprecise straight motion

Precision Engineering

Volumn 34, Issue 1, 2010, Pages 186-194

  Ro, Seung Kook ^a   Kim, Soohyun ^b   Kwak, Yoonkeun ^b   Park, Chun Hong ^a  

^a Korea Institute of Machine and Materials   (South Korea)

^b Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

Active magnetic preload; Air bearing stage; Magnetic circuit model; Motion error compensation; Porous air bearing

Indexed keywords

ACTIVE MAGNETIC PRELOAD; AIR BEARING STAGE; MAGNETIC CIRCUIT MODEL; MOTION ERROR COMPENSATION; POROUS AIR BEARING;

ACTUATORS; BEARINGS (STRUCTURAL); CIRCUIT THEORY; CURVE FITTING; ERROR COMPENSATION; INTERFEROMETERS; LASER INTERFEROMETRY; MAGNETIC CIRCUITS; MAGNETIC MATERIALS; MAGNETISM; MAGNETS;

BEARING CAPACITY;

EID: 70350127985     PISSN: 01416359     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.precisioneng.2009.06.010     Document Type: Article

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