Fabrication of optical mosaic gratings: A self-referencing alignment method

Optics Express

Volumn 19, Issue 10, 2011, Pages 8985-8993

  Shi, Lei ^a   Zeng, Lijiang ^a  

^a TSINGHUA UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ERRORS; FABRICATION;

ALIGNMENT METHODS; ALIGNMENT TECHNIQUE; DRIFT ERRORS; EXPOSURE SYSTEM; LATENT IMAGES; REFERENCE OBJECTS; SELF-REFERENCING; WAVEFRONT ERRORS; WHOLE SYSTEMS;

ALIGNMENT;

EID: 79955829543     PISSN: None     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OE.19.008985     Document Type: Article

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