Design and control of a long-traveling nano-positioning stage

Precision Engineering

Volumn 34, Issue 3, 2010, Pages 497-506

  Liu, Chien Hung ^a   Jywe, Wen Yuh ^a,b   Jeng, Yeau Ren ^c   Hsu, Tung Hui ^c   Li, Yi tsung ^a  

^a NATIONAL FORMOSA UNIVERSITY   (Taiwan)

^b NATIONAL APPLIED RESEARCH LABORATORIES   (Taiwan)

^c NATIONAL CHUNG CHENG UNIVERSITY   (Taiwan)

Author keywords

3 DOF piezo stage; Ball screw; Dual Axis Long Traveling Nano Positioning Stage

Indexed keywords

BALL-SCREW; CLOSED LOOP CONTROLLERS; CONTOURING ACCURACY; DESIGN AND CONTROL; DUAL AXIS; HIGH PRECISION STAGE; LASER INTERFEROMETER; LONG-TRAVEL; MEASURING SYSTEMS; NANO-POSITIONING; OPTICAL MEASURING SYSTEMS; PID CONTROLLERS; PLANE MIRRORS; ROTATION ACCURACY; ROTATION MECHANISM;

INTERFEROMETERS; LASER INTERFEROMETRY; MEASUREMENT THEORY; MIRRORS; PIEZOELECTRIC ACTUATORS; PROPORTIONAL CONTROL SYSTEMS; ROTATION;

SPHERES;

EID: 77951297948     PISSN: 01416359     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.precisioneng.2010.01.003     Document Type: Article

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