Design and construction of a two-degree-of-freedom linear encoder for nanometric measurement of stage position and straightness

Precision Engineering

Volumn 34, Issue 1, 2010, Pages 145-155

  Kimura, Akihide ^a   Gao, Wei ^a   Arai, Yoshikazu ^a   Lijiang, Zeng ^b  

^a TOHOKU UNIVERSITY   (Japan)

^b TSINGHUA UNIVERSITY   (China)

Author keywords

Linear encoder; Measurement; Position; Straightness; Two degree of freedom displacement

Indexed keywords

DESIGN AND CONSTRUCTION; DIFFRACTED BEAMS; FIRST-ORDER; INTERFERENCE SIGNAL; LINEAR ENCODER; LINEAR ENCODERS; LINEAR STAGES; NANOMETRICS; OPTICAL CONFIGURATIONS; POSITION; REFERENCE GRATING; SCALE GRATING; SCALE LENGTH; STRAIGHTNESS; SUBNANOMETER RESOLUTION; TWO-DEGREE-OF-FREEDOM; TWO-DEGREE-OF-FREEDOM DISPLACEMENT;

OPTICAL SENSORS;

EID: 70350129957     PISSN: 01416359     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.precisioneng.2009.05.008     Document Type: Article

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