Needs and advances in metrology for precision motion control in mechatronics

18th IMEKO World Congress 2006: Metrology for a Sustainable Development

Volumn 3, Issue , 2006, Pages 2527-2531

  Hocken, Robert J ^a   Schattenburg, Mark L ^b  

^a UNIVERSITY OF NORTH CAROLINA AT CHARLOTTE   (United States)

^b MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

Heterodyne; Interferometry; Lithography; Nano grids; Nanotechnology

Indexed keywords

HETERODYNE; NANO DEVICE; NANO GRIDS; NANO-GRATINGS; POSSIBLE FUTURES; PRECISION MOTION CONTROL; PRODUCTION MACHINES;

INTERFEROMETRY; LITHOGRAPHY; MOTION CONTROL; NANOTECHNOLOGY; PLANNING; SUSTAINABLE DEVELOPMENT;

UNITS OF MEASUREMENT;

EID: 84877763941     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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