Measurement of multi-degree-of-freedom error motions of a precision linear air-bearing stage

Precision Engineering

Volumn 30, Issue 1, 2006, Pages 96-103

  Gao, Wei ^a   Arai, Yoshikazu ^a   Shibuya, Atsushi ^a   Kiyono, Satoshi ^a   Park, Chun Hong ^b  

^a TOHOKU UNIVERSITY   (Japan)

^b Korea Institute of Machine and Materials   (South Korea)

Author keywords

Air bearing; Error motion; Linear motor; Linear stage; Measurement; Pitch; Roll; Straightness; Yaw

Indexed keywords

BEARINGS (MACHINE PARTS); CAPACITANCE; DEGREES OF FREEDOM (MECHANICS); ERROR ANALYSIS; INTERFEROMETRY; LASER BEAMS; LINEAR MOTORS; MEASUREMENTS; RELIABILITY; ROLLS (MACHINE COMPONENTS); SCANNING;

AIR-BEARING; ERROR MOTION; LINEAR STAGE; PITCH; ROLL; STRAIGHTNESS; YAW;

PRECISION ENGINEERING;

EID: 27844588897     PISSN: 01416359     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.precisioneng.2005.06.003     Document Type: Article

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