Design and precision construction of novel magnetic-levitation-based multi-axis nanoscale positioning systems

Precision Engineering

Volumn 31, Issue 4, 2007, Pages 337-350

  Kim, Won jong ^a   Verma, Shobhit ^a   Shakir, Huzefa ^a  

^a Texas AandM University   (United States)

Author keywords

Magnetic levitation; Multi DOF motion control; Nanopositioning; Precision assembly

Indexed keywords

ACTUATORS; DEGREES OF FREEDOM (MECHANICS); MAGNETIC LEVITATION; MICROFABRICATION; MOTION CONTROL; NANOSTRUCTURED MATERIALS;

NANOMANIPULATION; NANOPOSITIONING; NANOSCALE POSITIONING SYSTEMS; PRECISION ASSEMBLY;

POSITION CONTROL;

EID: 34547673290     PISSN: 01416359     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.precisioneng.2007.02.001     Document Type: Article

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