Position and out-of-straightness measurement of a precision linear air-bearing stage by using a two-degree-of-freedom linear encoder

Measurement Science and Technology

Volumn 21, Issue 5, 2010, Pages

  Kimura, Akihide ^a   Gao, Wei ^a   Lijiang, Zeng ^b  

^a TOHOKU UNIVERSITY   (Japan)

^b TSINGHUA UNIVERSITY   (China)

Author keywords

Linear air bearing stage; Linear encoder; Measurement; Out of straightness; Position

Indexed keywords

BEARINGS (MACHINE PARTS); MEASUREMENTS; OPTICAL SENSORS;

AIR BEARING STAGES; INTERFERENCE SIGNAL; LINEAR ENCODERS; OPTICAL DISPLACEMENT SENSOR; OUT-OF-STRAIGHTNESS; POSITION; SIMULTANEOUS MEASUREMENT; TWO-DEGREE OF FREEDOM;

DEGREES OF FREEDOM (MECHANICS);

EID: 77950947407     PISSN: 09570233     EISSN: 13616501     Source Type: Journal    
DOI: 10.1088/0957-0233/21/5/054005     Document Type: Article

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