Design evaluation of a single-axis precision controlled positioning stage

Precision Engineering

Volumn 33, Issue 4, 2009, Pages 418-424

  Buice, Eric S ^a,c   Otten, David ^b   Yang, Raymond H ^a   Smith, Stuart T ^a   Hocken, Robert J ^a   Trumper, David L ^b  

^a University of North Carolina at Charlotte   (United States)

^b MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

^c DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

Cascade controller; Precision slideway; UHMWPE bearing

Indexed keywords

CASCADE CONTROLLER; DESIGN AND CONTROL; DESIGN EVALUATION; DISPLACEMENT DEMAND; DRIVE SYSTEMS; DYNAMIC INTERACTION; FEEDBACK ERROR; MAXIMUM VELOCITY; POSITIONING STAGE; PRECISION SLIDEWAY; PZT; SINGLE-AXIS; UHMWPE BEARING;

BEARINGS (STRUCTURAL); CONTROLLERS; DRIVES; PIEZOELECTRIC TRANSDUCERS; POLYETHYLENES; SLIDEWAYS;

NONMETALLIC MATRIX COMPOSITES;

EID: 67650444619     PISSN: 01416359     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.precisioneng.2008.11.001     Document Type: Article

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