High resolution planar encoder by retro-reflection

Review of Scientific Instruments

Volumn 76, Issue 8, 2005, Pages 1-7

  Kao, Ching Fen ^a,c   Lu, Sheng Hua ^b   Lu, Mao Hong ^a  

^a NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

^b FENG CHIA UNIVERSITY   (Taiwan)

^c INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

DIFFRACTION GRATINGS; LASER APPLICATIONS; REFLECTION; SENSORS;

ELECTRONIC INTERPOLATION; ENCODERS; PIEZO STAGE; PLANAR DIFFRACTIVE LASER ENCODER SYSTEM (PDLENS);

ELECTRONIC EQUIPMENT;

EID: 26444561906     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2006368     Document Type: Article

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