6-Degree-of-freedom measurement system for the accuracy of X-Y stages

Precision Engineering

Volumn 24, Issue 1, 2000, Pages 15-23

  Fan, Kuang Chao ^a   Chen, Mu Jung ^b  

^a NATIONAL TAIWAN UNIVERSITY   (Taiwan)

^b LUNGHWA UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

DEGREES OF FREEDOM (MECHANICS); DOPPLER EFFECT; LASER APPLICATIONS; LIGHT REFLECTION; PRECISION ENGINEERING;

MOTION ACCURACY; X-Y STAGE;

MEASUREMENT ERRORS;

EID: 0033730123     PISSN: 01416359     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0141-6359(99)00021-5     Document Type: Article

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