Fabrication of optical mosaic gratings with phase and attitude adjustments employing latent fringes and a red-wavelength dual-beam interferometer

Optics Express

Volumn 17, Issue 24, 2009, Pages 21530-21543

  Shi, Lei ^a   Zeng, Lijiang ^a   Li, Lifeng ^a  

^a TSINGHUA UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

INTERFEROMETERS; LASER MIRRORS;

DIFFRACTION WAVEFRONT ERROR; DUAL BEAM INTERFEROMETERS; LATERAL POSITIONS; MULTI DIMENSIONAL; OPTICAL SUB-SYSTEMS; REFERENCE GRATING; ROOT MEAN SQUARE VALUES; SUBSTRATE ALIGNMENT;

DIFFRACTION GRATINGS;

ALGORITHM; ARTICLE; EQUIPMENT DESIGN; HOLOGRAPHY; INSTRUMENTATION; INTERFEROMETRY; LASER; METHODOLOGY; OPTICS; REFRACTOMETRY; REPRODUCIBILITY;

ALGORITHMS; EQUIPMENT DESIGN; HOLOGRAPHY; INTERFEROMETRY; LASERS; OPTICS AND PHOTONICS; REFRACTOMETRY; REPRODUCIBILITY OF RESULTS;

EID: 72449175209     PISSN: None     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OE.17.021530     Document Type: Article

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