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Volumn 59, Issue 1, 2010, Pages 525-528

A newly developed three-dimensional profile scanner with nanometer spatial resolution

Author keywords

Control; Measuring machine; Probe

Indexed keywords

3D PROFILE; ACTIVE VIBRATION; HYBRID ACTUATOR; MEASURING MACHINE; MEASURING MACHINES; MOTION PLATFORMS; PERFORMANCE EVALUATION; PROBING SYSTEM; SPATIAL RESOLUTION; THREE-DIMENSIONAL (3D); VOICE COIL MOTORS;

EID: 77955312044     PISSN: 00078506     EISSN: 17260604     Source Type: Journal    
DOI: 10.1016/j.cirp.2010.03.022     Document Type: Article
Times cited : (28)

References (11)
  • 2
    • 43649088471 scopus 로고    scopus 로고
    • Development of the Nano-Probe System Based on the Laser-Trapping Technique
    • M. Michihata, Y. Takaya, and T. Hayashi Development of the Nano-Probe System Based on the Laser-Trapping Technique CIRP Annals 57 1 2008 493 496
    • (2008) CIRP Annals , vol.57 , Issue.1 , pp. 493-496
    • Michihata, M.1    Takaya, Y.2    Hayashi, T.3
  • 3
    • 0035660415 scopus 로고    scopus 로고
    • Contribution of CIRP to the Development of Metrology and Surface Quality Evaluation during the Last Fifty Years
    • J. Perters Contribution of CIRP to the Development of Metrology and Surface Quality Evaluation during the Last Fifty Years Annals of the CIRP 50 2 2001 471 488
    • (2001) Annals of the CIRP , vol.50 , Issue.2 , pp. 471-488
    • Perters, J.1
  • 6
    • 34250179881 scopus 로고    scopus 로고
    • Long Range 3D Scanning Tunnelling Microscopy
    • A. Weckenmann, and J. Hoffmann Long Range 3D Scanning Tunnelling Microscopy Annals of the CIRP 56 1 2007 525 528
    • (2007) Annals of the CIRP , vol.56 , Issue.1 , pp. 525-528
    • Weckenmann, A.1    Hoffmann, J.2
  • 7
    • 0034963732 scopus 로고    scopus 로고
    • Dynamics and Control of the UNCC/MIT Sub-Atomic Measuring Machine
    • R.J. Hocken, D.L. Trumper, and C. Wang Dynamics and Control of the UNCC/MIT Sub-Atomic Measuring Machine Annals of the CIRP 50 1 2001 373 376
    • (2001) Annals of the CIRP , vol.50 , Issue.1 , pp. 373-376
    • Hocken, R.J.1    Trumper, D.L.2    Wang, C.3
  • 8
    • 0034959603 scopus 로고    scopus 로고
    • High Speed Nanometer Positioning Using a Hybrid Linear Motor
    • H. Shinno, and H. Hashizume High Speed Nanometer Positioning Using a Hybrid Linear Motor Annals of the CIRP 50 1 2001 243 246
    • (2001) Annals of the CIRP , vol.50 , Issue.1 , pp. 243-246
    • Shinno, H.1    Hashizume, H.2
  • 10
    • 73249118065 scopus 로고    scopus 로고
    • A Newly Developed Linear Motor-Driven Aerostatic X-Y Planar Motion Table System for Nano-machining
    • H. Shinno, H. Yoshioka, and K. Taniguchi A Newly Developed Linear Motor-Driven Aerostatic X-Y Planar Motion Table System for Nano-machining Annals of the CIRP 56 1 2007 369 372
    • (2007) Annals of the CIRP , vol.56 , Issue.1 , pp. 369-372
    • Shinno, H.1    Yoshioka, H.2    Taniguchi, K.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.