A newly developed three-dimensional profile scanner with nanometer spatial resolution

CIRP Annals - Manufacturing Technology

Volumn 59, Issue 1, 2010, Pages 525-528

  Shinno, H ^a   Yoshioka, H ^a   Gokan, T ^a   Sawano, H ^a  

^a Tokyo Institute of Technology ^*  (Japan)

Author keywords

Control; Measuring machine; Probe

Indexed keywords

3D PROFILE; ACTIVE VIBRATION; HYBRID ACTUATOR; MEASURING MACHINE; MEASURING MACHINES; MOTION PLATFORMS; PERFORMANCE EVALUATION; PROBING SYSTEM; SPATIAL RESOLUTION; THREE-DIMENSIONAL (3D); VOICE COIL MOTORS;

IMAGE RESOLUTION; MEASUREMENTS; PROBES; SCANNING TUNNELING MICROSCOPY; SURFACE TOPOGRAPHY;

THREE DIMENSIONAL;

EID: 77955312044     PISSN: 00078506     EISSN: 17260604     Source Type: Journal    
DOI: 10.1016/j.cirp.2010.03.022     Document Type: Article

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