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Volumn 21, Issue 1, 1997, Pages 29-35
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Conceptual design and study of high precision translational stages: Application to an optical delay line
a,b
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Author keywords
Air bearing; Delay line; Error budget; Error movement; Finite element modeling analysis; High precision; Rolling contact
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Indexed keywords
ERROR ANALYSIS;
FINITE ELEMENT METHOD;
MATHEMATICAL MODELS;
NATURAL FREQUENCIES;
PRECISION ENGINEERING;
OPTICAL DELAY LINE;
ROLLING CONTACT;
INTERFEROMETERS;
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EID: 0031176643
PISSN: 01416359
EISSN: None
Source Type: Journal
DOI: 10.1016/s0141-6359(97)00063-9 Document Type: Article |
Times cited : (20)
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References (5)
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