Precision nano-fabrication and evaluation of a large area sinusoidal grid surface for a surface encoder

Precision Engineering

Volumn 27, Issue 3, 2003, Pages 289-298

  Gao, Wei ^a   Araki, Takeshi ^a   Kiyono, Satoshi ^a   Okazaki, Yuichi ^b   Yamanaka, Masashi ^a  

^a TOHOKU UNIVERSITY   (Japan)

^b NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

Accuracy; Center alignment; DFT; Diamond turning; Evaluation; Fabrication; Fast tool servo; Micro structured surface; Nanometer; Sinusoidal surface

Indexed keywords

ACTUATORS; CAPACITANCE; DIAMONDS; FOURIER TRANSFORMS; MICROSCOPES; PRECISION ENGINEERING; SENSORS; VACUUM;

SINUSOIDAL WAVES;

NANOTECHNOLOGY;

EID: 0042745544     PISSN: 01416359     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0141-6359(03)00028-X     Document Type: Article

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