A Three-axis Displacement Sensor with Nanometric Resolution

CIRP Annals - Manufacturing Technology

Volumn 56, Issue 1, 2007, Pages 529-532

  Gao, W ^a   Kimura, A ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

Displacement; Metrology; Sensor

Indexed keywords

DIFFRACTION; INTERFEROMETERS; LIGHT; MIRRORS; OPTICAL RESOLVING POWER;

LIGHT BEAMS; NANOMETRIC RESOLUTIONS; PLANE MIRRORS; Z-DIRECTIONAL DISPLACEMENT;

SENSORS;

EID: 34250208806     PISSN: 00078506     EISSN: 17260604     Source Type: Journal    
DOI: 10.1016/j.cirp.2007.05.126     Document Type: Article

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