Direct nanoimprint lithography of Al 2O 3 using a chelated monomer-based precursor

Nanotechnology

Volumn 23, Issue 31, 2012, Pages

  Ganesan, Ramakrishnan ^a,c   Dinachali, Saman Safari ^a,b   Lim, Su Hui ^a,b   Saifullah, M S M ^a   Chong, Wee Tit ^b   Lim, Andrew H H ^b   Yong, Jin Jie ^b   Thian, Eng San ^b   He, Chaobin ^a,b   Low, Hong Yee ^a  

^a INSTITUTE OF MATERIALS RESEARCH AND ENGINEERING   (Singapore)

^b NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

^c BIRLA INSTITUTE OF TECHNOLOGY AND SCIENCE   (India)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM FILM; ALUMINUM TRI-SEC-BUTOXIDE; ANODIZATIONS; ANODIZED ALUMINUM OXIDE; CROSSLINKER; DEMOLDING; ETHYLACETOACETATE; FREE-RADICAL CO-POLYMERIZATION; IMPRINTED STRUCTURES; IN-SITU; METAL ATOMS; METAL OXIDES; METHACRYLATE GROUPS; NANO-IMPRINTING; NANO-STRUCTURING; ORGANICS; PROCESSABLE; STABLE PRECURSORS;

ALUMINUM; MONOMERS; NANOIMPRINT LITHOGRAPHY; SOL-GEL PROCESS; SOL-GELS;

CHELATION;

EID: 84863926438     PISSN: 09574484     EISSN: 13616528     Source Type: Journal    
DOI: 10.1088/0957-4484/23/31/315304     Document Type: Article

References (38)

1. 3 nanolaminates Science 303 989-90 (Pubitemid 38209697)
2. Gestel T V, Vandecasteele C, Buekenhoudt A, Dotremont C, Luyten J, Leysen R, Bruggen B V and Maes G 2002 Alumina titania multilayer membranes for nanofiltration: preparation characterization chemical stability J. Membr. Sci. 207 73-89 (Pubitemid 34754303)
3. 9LiTFSI polymer electrolyte system Electrochim. Acta 47 3257-68 (Pubitemid 34862792)
4. 3 coatings fabricated using plasma electrolysis Surf. Coat. Technol. 149 245-51 (Pubitemid 34088809)
5. 3 coating films with high transparency J. Am. Ceram. Soc. 80 1040-2 (Pubitemid 127579065)
6. Yogeswaran U and Chen S-M 2008 A review on the electrochemical sensors and biosensors composed of nanowires as sensing material Sensors 8 290-313
7. 2 oxygen sensor fabricated using anodic aluminium oxide as an etching mask Sensors 10 670-83
8. Lei Y, Cai W and Wilde G 2007 Highly ordered nanostructures with tunable size, shape and properties: a new way to surface nano-patterning using ultra-thin alumina masks Prog. Mater. Sci. 52 465-539
9. Xu C, Wang H, Shen P K and Jiang S P 2007 Highly ordered Pd nanowire arrays as effective electrocatalysts for ethanol oxidation in direct alcohol fuel cells Adv. Mater. 19 4256-9 (Pubitemid 350254807)
10. Kim J S, Park Y, Lee D Y, Lee J H, Park J H, Kim J K and Cho K 2010 Poly(3-hexylthiophene) nanorods with aligned chain orientation for organic photovoltaics Adv. Funct. Mater. 20 540-5
11. Baek S, Park J B, Lee W, Han S-H, Lee J and Lee S-H 2009 A facile method to prepare regioregular poly(3-hexylthiophene) nanorod arrays using anodic aluminium oxide templates and capillary force New J. Chem. 33 986-90
12. Zhang D, Luo L, Liao Q, Wang H, Fu H and Yao J 2011 Polypyrrole/ZnS core/shell coaxial nanowires prepared by anodic aluminum oxide template methods J. Phys. Chem. C 115 2360-5
13. Makino E, Shibata T and Yamada Y 1999 Micromachining of fine ceramics by photolithography Sensors Actuators A 75 278-88
14. Göbel O F, Nedelcu M and Steiner U 2007 Soft lithography of ceramic patterns. Adv. Funct. Mater. 17 1131-6 (Pubitemid 46762599)
15. Zhu Z, Wei X and Jiang K A 2007 Net-shape fabrication process of alumina micro-components using a soft lithography technique J. Micromech. Microeng. 17 193-8 (Pubitemid 46778483)
16. Saifullah M S M, Kang D-J, Subramanian K R V, Welland M E, Yamazaki K and Kurihara K 2004 Electron beam nanolithography of β-ketoester modified aluminium tri-sec-butoxide J. Sol-Gel Sci. Technol. 29 5-10
17. Costner E A, Lin M W, Jen W-L and Willson C G 2009 Nanoimprint lithography materials development for semiconductor device fabrication Annu. Rev. Mater. Res. 39 155-80
18. Ro H W, Jones R L, Peng H, Hines D R, Lee H-J, Lin E K, Karim A, Yoon D Y, Gidley D W and Soles C L 2007 The direct patterning of nanoporous interlayer dielectric insulator films by nanoimprint lithography Adv. Mater. 19 2919-24 (Pubitemid 47597888)
19. Chou S Y, Krauss P R and Renstrom P J 1996 Imprint lithography with 25-nanometer resolution Science 272 85-7 (Pubitemid 126554924)
20. 2 gel gratings for optical applications J. Vac. Sci. Technol. B 21 660-3 (Pubitemid 36516595)
21. Voicu N E, Ludwigs S, Crossland E J W, Andrew P and Steiner U 2007 Solvent-vapor-assisted imprint lithography Adv. Mater. 19 757-61 (Pubitemid 46932848)
22. Hampton M J, Williams S S, Zhou Z, Nunes J, Ko D H, Templeton J L, Samulski E T and DeSimone J M 2008 The patterning of sub-500 nm inorganic oxide structures Adv. Mater. 20 2667-73
23. Yang K-Y, Yoon K-M, Choi K W and Lee H 2009 The direct nano-patterning of ZnO using nanoimprint lithography with ZnO-sol and thermal annealing Microelectron. Eng. 86 2228-31
24. 2 precursor films J. Vac. Sci. Technol. B 29 021603
25. 2 nanostructures Nanotechnology 21 285303
26. Ganesan R, Lim S H, Saifullah M S M, Hussain H, Kwok J X Q, Tse R L X, Bo H A P and Low H Y 2011 Direct nanoimprinting of metal oxides by in situ thermal co-polymerization of their methacrylates J. Mater. Chem. 21 4484-92
27. Kayan A, Hoebbel D and Schmidt H 2005 Complexation of titanium alkoxides with pentenoic acid and allylacetoacetate and their hydrolysis and addition reactions with H-silanes J. Appl. Polym. Sci. 95 790-6 (Pubitemid 40136427)
28. Méndez-Vivar J, Bosch P, Lara V H and Mendoza-Serna R 2002 The role of 2-(methacryloyloxy) ethyl acetoacetate in the polymerization of hybridmulticomponent (Si, Ti, Zr) sols J. Sol-Gel Sci. Technol. 25 249-54 (Pubitemid 35312028)
29. Patel M P, Braden M and Davy K W 1987 Polymerization shrinkage of methacrylate esters Biomaterials 8 53-6 (Pubitemid 17235135)
30. Lee B K, Cha N-G, Hong L-Y, Kim D-P, Tanaka H, Lee H Y and Kawai T 2010 Photocurable silsesquioxane-based formulations as versatile resins for nanoimprint lithography Langmuir 26 14915-22
31. Lin H, Wan X, Jiang X, Wang Q and Yin J A 2011 Nanoimprint lithography hybrid photoresist based on the thiol-ene system Adv. Funct. Mater. 21 2960-7
32. Tay B K, Zhao Z W and Sun C Q 2005 Effects of substrate bias and growth temperature on properties of aluminium oxide thin films by using filtered cathodic vacuum arc Surf. Coat. Technol. 198 94-7 (Pubitemid 40864536)
33. Li Q, Yu Y-H, Bhatia C S, Marks L D, Lee S C and Chung Y W 2000 Low-temperature magnetron sputter-deposition, hardness, and electrical resistivity of amorphous and crystalline alumina thin films J. Vac. Sci. Technol. A 18 2333-8
34. Yin A J, Li J, Jian W, Bennett A J and Xu J M 2001 Fabrication of highly ordered metallic nanowire arrays by electrodeposition Appl. Phys. Lett. 79 1039-41
35. Kim K, Kim M and Cho S M 2006 Pulsed Electrodeposition of palladium nanowire arrays using AAO template Mater. Chem. Phys. 96 278-82 (Pubitemid 43171774)
36. Liu K, Fournier-Bidoz S, Ozin G A and Manners I 2009 Highly ordered magnetic ceramic nanorod arrays from a polyferrocenylsilane by nanoimprint lithography with anodic aluminum oxide templates Chem. Mater. 21 1781-3
37. Takeuchi M, Maegawa T, Shimizu H, Ooishi S, Ohtsuka T and Aoyagi Y 2009 AlN/AlGaN short-period superlattice sacrificial layers in laser lift-off for vertical-type AlGaN-based deep ultraviolet light emitting diodes Appl. Phys. Lett. 94 061117
38. Bae C, Yoo H, Kim S, Lee K, Kim J, Sung M M and Shin H 2008 Template directed oxide nanotubes: synthesis, characterization, and applications Chem. Mater. 20 756-67 (Pubitemid 351315678)