A net-shape fabrication process of alumina micro-components using a soft lithography technique

Journal of Micromechanics and Microengineering

Volumn 17, Issue 2, 2007, Pages 193-198

  Zhu, Zhigang ^a   Wei, Xueyong ^a   Jiang, Kyle ^a  

^a UNIVERSITY OF BIRMINGHAM   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINA; BIOCOMPATIBILITY; LITHOGRAPHY; PH EFFECTS; VISCOSITY MEASUREMENT;

ALUMINA SUSPENSION; FREE-STANDING MICROCOMPONENTS; MICROCERAMIC COMPONENTS; SOFT LITHOGRAPHY;

MICROFABRICATION;

EID: 34249063628     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/17/2/002     Document Type: Article

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