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Volumn 21, Issue 12, 2011, Pages 4484-4492
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Direct nanoimprinting of metal oxides by in situ thermal co-polymerization of their methacrylates
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Author keywords
[No Author keywords available]
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Indexed keywords
CROSSLINKER;
DEMOLDING;
ETHYLENE GLYCOL DIMETHACRYLATE;
GENERAL METHOD;
HIGHER-DEGREE;
IMPRINTED STRUCTURES;
IN-SITU;
METAL ATOMS;
METAL OXIDES;
METHYL METHACRYLATES;
NANO-IMPRINTING;
ORGANIC MATERIALS;
ORGANICS;
OXIDATION STATE;
RADICAL COPOLYMERIZATION;
RESIN COMPOSITION;
SILICON MOLDS;
SURFACE ENERGIES;
THERMAL NANOIMPRINT LITHOGRAPHY;
TIO;
ULTRA-VIOLET;
VERY HIGH RESOLUTION;
ACRYLIC MONOMERS;
CARBON FIBER REINFORCED PLASTICS;
CRYSTAL ATOMIC STRUCTURE;
ESTERS;
ETHYLENE;
ETHYLENE GLYCOL;
FREE RADICAL POLYMERIZATION;
FREE RADICALS;
METALS;
NIOBIUM;
POLYMERS;
RESINS;
SHRINKAGE;
SURFACE CHEMISTRY;
TANTALUM;
NANOIMPRINT LITHOGRAPHY;
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EID: 79952603828
PISSN: 09599428
EISSN: 13645501
Source Type: Journal
DOI: 10.1039/c0jm04105j Document Type: Article |
Times cited : (23)
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References (38)
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