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Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics

Volumn 29, Issue 2, 2011, Pages

Pressureless nanoimprinting of anatase TiO2 precursor films

(4) Richmond, Dustin A a,b Zhang, Qifeng c Cao, Guozhong c Weiss, Dirk N a,b

a UNIVERSITY OF WASHINGTON (United States)

b Campus Box 352500 (United States)

c University of Washington (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ETHANOL; SILICONES; TITANIUM; TITANIUM DIOXIDE;

ANATASE TIO; DE FACTO; HIGH QUALITY; METHOXY; NANO-IMPRINTING; PRECURSOR FILMS; PRESSURELESS; SOFT-IMPRINT; SOL PRECURSORS; TITANIUM BUTOXIDE;

ORGANIC SOLVENTS;

EID: 79953768562 PISSN: 21662746 EISSN: 21662754 Source Type: Journal
DOI: 10.1116/1.3562955 Document Type: Article

Times cited : (15)

References (27)

1
- 84975603049
- 0146-9592, 10.1364/OL.8.000537
- W. Lukosz and K. Tiefenthaler, Opt. Lett. 0146-9592 8, 537 (1983). 10.1364/OL.8.000537
- (1983) Opt. Lett. , vol.8 , pp. 537
- Lukosz, W.¹ Tiefenthaler, K.²

2
- 0022532819
- 0003-6935, 10.1364/AO.25.001499
- K. Heuberger and W. Lukosz, Appl. Opt. 0003-6935 25, 1499 (1986). 10.1364/AO.25.001499
- (1986) Appl. Opt. , vol.25 , pp. 1499
- Heuberger, K.¹ Lukosz, W.²

3
- 0031549403
- 0022-3093, 10.1016/S0022-3093(97)00170-1
- R. Brendel, A. Gier, M. Mennig, H. Schmidt, and J. H. Werner, J. Non-Cryst. Solids 0022-3093 218, 391 (1997). 10.1016/S0022-3093(97)00170-1
- (1997) J. Non-Cryst. Solids , vol.218 , pp. 391
- Brendel, R.¹ Gier, A.² Mennig, M.³ Schmidt, H.⁴ Werner, J.H.⁵

4
- 0032474326
- 0935-9648, 10.1002/(SICI)1521-4095(199805)10:8<571::AID-ADMA571>3. 0.CO;2-P
- C. Marzolin, S. P. Smith, M. Prentiss, and G. M. Whitesides, Adv. Mater. 0935-9648 10, 571 (1998). 10.1002/(SICI)1521-4095(199805)10:8<571::AID- ADMA571>3.0.CO;2-P
- (1998) Adv. Mater. , vol.10 , pp. 571
- Marzolin, C.¹ Smith, S.P.² Prentiss, M.³ Whitesides, G.M.⁴

5
- 0034300429
- 0935-9648, 10.1002/1521-4095(200010)12:19<1421::AID-ADMA1421>3.0. CO;2-4
- S. Seraji, Y. Wu, N. E. Jewell-Larson, M. J. Forbess, S. J. Limmer, T. P. Chou, and G. Z. Cao, Adv. Mater. 0935-9648 12, 1421 (2000). 10.1002/1521-4095(200010)12:19<1421::AID-ADMA1421>3.0.CO;2-4
- (2000) Adv. Mater. , vol.12 , pp. 1421
- Seraji, S.¹ Wu, Y.² Jewell-Larson, N.E.³ Forbess, M.J.⁴ Limmer, S.J.⁵ Chou, T.P.⁶ Cao, G.Z.⁷

6
- 0033735038
- 0038-092X, 10.1016/S0038-092X(00)00022-0
- A. Gombert, W. Glaubitt, K. Rose, J. Dreibholz, B. Blasi, A. Heinzel, D. Sporn, W. Döll, and V. Wittwer, Sol. Energy 0038-092X 68, 357 (2000). 10.1016/S0038-092X(00)00022-0
- (2000) Sol. Energy , vol.68 , pp. 357
- Gombert, A.¹ Glaubitt, W.² Rose, K.³ Dreibholz, J.⁴ Blasi, B.⁵ Heinzel, A.⁶ Sporn, D.⁷ Döll, W.⁸ Wittwer, V.⁹

7
- 0037276897
- 1071-1023, 10.1116/1.1545736
- M. T. Li, H. Tan, L. Chen, J. Wang, and S. Y. Chou, J. Vac. Sci. Technol. B 1071-1023 21, 660 (2003). 10.1116/1.1545736
- (2003) J. Vac. Sci. Technol. B , vol.21 , pp. 660
- Li, M.T.¹ Tan, H.² Chen, L.³ Wang, J.⁴ Chou, S.Y.⁵

8
- 0037274001
- 1071-1023, 10.1116/1.1545754
- S. Matsui, Y. Igaku, H. Ishigaki, J. Fujita, M. Ishida, Y. Ochiai, H. Namatsu, and M. Komuro, J. Vac. Sci. Technol. B 1071-1023 21, 688 (2003). 10.1116/1.1545754
- (2003) J. Vac. Sci. Technol. B , vol.21 , pp. 688
- Matsui, S.¹ Igaku, Y.² Ishigaki, H.³ Fujita, J.⁴ Ishida, M.⁵ Ochiai, Y.⁶ Namatsu, H.⁷ Komuro, M.⁸

9
- 0141604999
- 0003-6951, 10.1063/1.1606870
- C. Harnagea, M. Alexe, J. Schilling, J. Choi, R. B. Wehrspohn, D. Hesse, and U. Gösele, Appl. Phys. Lett. 0003-6951 83, 1827 (2003). 10.1063/1.1606870
- (2003) Appl. Phys. Lett. , vol.83 , pp. 1827
- Harnagea, C.¹ Alexe, M.² Schilling, J.³ Choi, J.⁴ Wehrspohn, R.B.⁵ Hesse, D.⁶ Gösele, U.⁷

10
- 11344286160
- Soft-lithographically embossed, multilayered distributed-feedback nanocrystal lasers
- DOI 10.1002/adma.200400033
- V. C. Sundar, H. J. Eisler, T. Deng, Y. T. Chan, E. L. Thomas, and M. G. Bawendi, Adv. Mater. 0935-9648 16, 2137 (2004). 10.1002/adma.200400033 (Pubitemid 40072910)
- (2004) Advanced Materials , vol.16 , Issue.23-24 , pp. 2137-2141
- Sundar, V.C.¹ Eisler, H.-J.² Deng, T.³ Chan, Y.⁴ Thomas, E.L.⁵ Bawendi, M.G.⁶

11
- 24344492375
- Nanostructuring titania by embossing with polymer molds made from anodic alumina templates
- DOI 10.1021/nl050704c
- C. Goh, K. M. Coakley, and M. D. McGehee, Nano Lett. 1530-6984 5, 1545 (2005). 10.1021/nl050704c (Pubitemid 41251687)
- (2005) Nano Letters , vol.5 , Issue.8 , pp. 1545-1549
- Goh, C.¹ Coakley, K.M.² McGehee, M.D.³

12
- 33746477557
- Study of nanoimprint pattern transfer on hydrogen silsesquioxane
- DOI 10.1116/1.2221314
- S. Z. Chen, J. F. Liu, H. J. H. Chen, and F. S. Huang, J. Vac. Sci. Technol. B 1071-1023 24, 1934 (2006). 10.1116/1.2221314 (Pubitemid 44140808)
- (2006) Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures , vol.24 , Issue.4 , pp. 1934-1940
- Chen, S.Z.¹ Liu, J.F.² Chen, H.J.H.³ Huang, F.S.⁴

13
- 34547571226
- Glass nanostructures fabricated by soft thermal nanoimprint
- DOI 10.1116/1.2748791
- C. Peroz, C. Heitz, E. Barthel, E. Søndergrd, and V. Goletto, J. Vac. Sci. Technol. B 1071-1023 25, L27 (2007). 10.1116/1.2748791 (Pubitemid 47192157)
- (2007) Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures , vol.25 , Issue.4
- Peroz, C.¹ Heitz, C.² Barthel, E.³ Sondergrd, E.⁴ Goletto, V.⁵

14
- 60349131290
- 0935-9648, 10.1002/adma.200702484
- C. Peroz, V. Chauveau, E. Barthel, and E. Søndergrd, Adv. Mater. 0935-9648 21, 555 (2009). 10.1002/adma.200702484
- (2009) Adv. Mater. , vol.21 , pp. 555
- Peroz, C.¹ Chauveau, V.² Barthel, E.³ Søndergrd, E.⁴

15
- 70350337805
- 0935-9648, 10.1002/adma.200803243
- J. Kim, M. Kim, M. J. Lee, J. S. Lee, K. Shin, and Y. S. Kim, Adv. Mater. 0935-9648 21, 4050 (2009). 10.1002/adma.200803243
- (2009) Adv. Mater. , vol.21 , pp. 4050
- Kim, J.¹ Kim, M.² Lee, M.J.³ Lee, J.S.⁴ Shin, K.⁵ Kim, Y.S.⁶

16
- 69549133615
- 0040-6090, 10.1016/j.tsf.2009.07.056
- K. M. Yoon, K. Y. Yang, and H. Lee, Thin Solid Films 0040-6090 518, 126 (2009). 10.1016/j.tsf.2009.07.056
- (2009) Thin Solid Films , vol.518 , pp. 126
- Yoon, K.M.¹ Yang, K.Y.² Lee, H.³

17
- 76949084620
- 0167-9317, 10.1016/j.mee.2009.11.134
- R. Ji, M. Hornung, M. A. Verschuuren, R. van de Laar, J. van Eekelen, U. Plachetka, M. Moeller, and C. Moormann, Microelectron. Eng. 0167-9317 87, 963 (2010). 10.1016/j.mee.2009.11.134
- (2010) Microelectron. Eng. , vol.87 , pp. 963
- Ji, R.¹ Hornung, M.² Verschuuren, M.A.³ Van De Laar, R.⁴ Van Eekelen, J.⁵ Plachetka, U.⁶ Moeller, M.⁷ Moormann, C.⁸

18
- 77957227761
- 1071-1023, 10.1116/1.3463454
- D. N. Weiss, S. T. Meyers, and D. A. Keszler, J. Vac. Sci. Technol. B 1071-1023 28, 823 (2010). 10.1116/1.3463454
- (2010) J. Vac. Sci. Technol. B , vol.28 , pp. 823
- Weiss, D.N.¹ Meyers, S.T.² Keszler, D.A.³

19
- 78650125635
- 1071-1023, 10.1116/1.3498754
- D. N. Weiss, H. -C. Yuan, B. G. Lee, H. M. Branz, S. T. Meyers, A. Grenville, and D. A. Keszler, J. Vac. Sci. Technol. B 1071-1023 28, C6M98 (2010). 10.1116/1.3498754
- (2010) J. Vac. Sci. Technol. B , vol.28
- Weiss, D.N.¹ Yuan, H.-C.² Lee, B.G.³ Branz, H.M.⁴ Meyers, S.T.⁵ Grenville, A.⁶ Keszler, D.A.⁷

20
- 0031632795
- 0084-6600, 10.1146/annurev.matsci.28.1.153
- Y. N. Xia and G. M. Whitesides, Annu. Rev. Mater. Sci. 0084-6600 28, 153 (1998). 10.1146/annurev.matsci.28.1.153
- (1998) Annu. Rev. Mater. Sci. , vol.28 , pp. 153
- Xia, Y.N.¹ Whitesides, G.M.²

21
- 34249861761
- Constrained sintering of alumina thin films: Comparison between experiment and modeling
- DOI 10.1111/j.1551-2916.2007.01650.x
- O. Guillon, E. Aulbach, J. Rödel, and R. K. Bordia, J. Am. Ceram. Soc. 0002-7820 90, 1733 (2007). 10.1111/j.1551-2916.2007.01650.x (Pubitemid 46862219)
- (2007) Journal of the American Ceramic Society , vol.90 , Issue.6 , pp. 1733-1737
- Guillon, O.¹ Aulbach, E.² Rodel, J.³ Bordia, R.K.⁴

22
- 57949095626
- 1359-6454, 10.1016/j.actamat.2008.09.041
- C. L. Martin and R. K. Bordia, Acta Mater. 1359-6454 57, 549 (2009). 10.1016/j.actamat.2008.09.041
- (2009) Acta Mater. , vol.57 , pp. 549
- Martin, C.L.¹ Bordia, R.K.²

23
- 0003484845
- (Academic, San Diego)
- C. J. Brinker and G. W. Scherer, Sol-Gel Science: The Physics and Chemistry of Sol-Gel Processing (Academic, San Diego, 1990), pp. 2-11.
- (1990) Sol-Gel Science: The Physics and Chemistry of Sol-Gel Processing , pp. 2-11
- Brinker, C.J.¹ Scherer, G.W.²

24
- 0032131322
- 0021-4922, 10.1143/JJAP.37.4603
- H. D. Nam, B. H. Lee, S. J. Kim, C. H. Jung, J. H. Lee, and S. Park, Jpn. J. Appl. Phys., Part 1 0021-4922 37, 4603 (1998). 10.1143/JJAP.37.4603
- (1998) Jpn. J. Appl. Phys., Part 1 , vol.37 , pp. 4603
- Nam, H.D.¹ Lee, B.H.² Kim, S.J.³ Jung, C.H.⁴ Lee, J.H.⁵ Park, S.⁶

25
- 77449158435
- 0142-2421, 10.1002/sia.3183
- D. Regonini, A. Jaroenworaluck, R. Stevens, and C. R. Bowen, Surf. Interface Anal. 0142-2421 42, 139 (2010). 10.1002/sia.3183
- (2010) Surf. Interface Anal. , vol.42 , pp. 139
- Regonini, D.¹ Jaroenworaluck, A.² Stevens, R.³ Bowen, C.R.⁴

26
- 0008010681
- 81st ed., edited by D. R. Lide (CRC, Boca Raton)
- CRC Handbook of Chemistry and Physics, 81st ed., edited by, D. R. Lide, (CRC, Boca Raton, 2000), pp. 4-141.
- (2000) CRC Handbook of Chemistry and Physics , pp. 4-141

27
- 68949216970
- 1293-2558, 10.1016/j.solidstatesciences.2009.05.026
- K. Jiang, A. Zakutayev, J. Stowers, M. D. Anderson, J. Tate, D. H. McIntyre, D. C. Johnson, and D. A. Keszler, Solid State Sci. 1293-2558 11, 1692 (2009). 10.1016/j.solidstatesciences.2009.05.026
- (2009) Solid State Sci. , vol.11 , pp. 1692
- Jiang, K.¹ Zakutayev, A.² Stowers, J.³ Anderson, M.D.⁴ Tate, J.⁵ McIntyre, D.H.⁶ Johnson, D.C.⁷ Keszler, D.A.⁸

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