Large area direct nanoimprinting of SiO2-TiO2 gel gratings for optical applications

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 21, Issue 2, 2003, Pages 660-663

  Li, Mingtao ^a   Tan, Hua ^a   Chen, Lei ^a,b   Wang, Jian ^a,b   Chou, Stephen Y ^a  

^a Princeton University   (United States)

^b NanoOpto Corporation   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; DIFFRACTION GRATINGS; LITHOGRAPHY; PASSIVATION; SILICA GEL; SOL-GELS; SURFACE ACTIVE AGENTS; SURFACE ROUGHNESS; TITANIUM DIOXIDE;

NANOIMPRINTING;

NANOTECHNOLOGY;

EID: 0037276897     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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