A macroporous TiO2 oxygen sensor fabricated using anodic aluminium oxide as an etching mask

Sensors

Volumn 10, Issue 1, 2010, Pages 670-683

  Lu, Chih Cheng ^a   Huang, Yong Sheng ^a   Huang, Jun Wei ^a   Chang, Chien Kuo ^a   Wu, Sheng Po ^a  

^a NATIONAL TAIPEI UNIVERSITY OF TECHNOLOGY   (Taiwan)

Author keywords

Anodic aluminium oxide (AAO); Macroporous; MEMS; TiO2 gas sensor

Indexed keywords

ANODIC ALUMINIUM OXIDE; BIO-CHEMICAL SENSOR; CHEMO-RESISTIVE GAS SENSORS; CONVENTIONAL PHOTOLITHOGRAPHY; MACRO POROUS SILICON; MACROPOROUS; PROCESS PARAMETERS; TIO;

ALUMINA; ANODIC OXIDATION; CMOS INTEGRATED CIRCUITS; GAS DETECTORS; MEMS; PHOTOLITHOGRAPHY; TITANIUM DIOXIDE;

POROUS SILICON;

ALUMINUM OXIDE; OXYGEN; TITANIUM; TITANIUM DIOXIDE;

ARTICLE; CHEMISTRY; ELECTRODE; ELECTROPLATING INDUSTRY; EQUIPMENT; EQUIPMENT DESIGN; INSTRUMENTATION; OXIMETRY; POROSITY; TRANSDUCER;

ALUMINUM OXIDE; ELECTRODES; ELECTROPLATING; EQUIPMENT DESIGN; EQUIPMENT FAILURE ANALYSIS; OXIMETRY; OXYGEN; POROSITY; TITANIUM; TRANSDUCERS;

EID: 77953655699     PISSN: 14248220     EISSN: None     Source Type: Journal    
DOI: 10.3390/s100100670     Document Type: Article

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