MNOS stack for reliable, low optical loss, Cu based CMOS plasmonic devices

Optics Express

Volumn 20, Issue 13, 2012, Pages 13612-13621

  Emboras, Alexandros ^a   Najar, Adel ^a   Nambiar, Siddharth ^a   Grosse, Philippe ^a   Augendre, Emmanuel ^a   Leroux, Charles ^a   De Salvo, Barbara ^a   De Lamaestre, Roch Espiau ^a  

^a CEA GRENOBLE   (France)

Author keywords

[No Author keywords available]

Indexed keywords

COPPER; NITRIDES; OPTICAL CONSTANTS; OPTICAL PROPERTIES; PHOTONICS; PLASMONS; SILICON WAFERS;

ACTIVE DEVICES; CHANNEL WAVEGUIDE; CMOS COMPATIBLE; CU-BASED; DIFFUSION BARRIER EFFECTS; ELECTRICAL RELIABILITY; ELECTROOPTICAL PROPERTIES; EXPERIMENTAL INVESTIGATIONS; PLASMONIC; PLASMONIC DEVICES; SILICON PHOTONICS; ULTRA-THIN; WAFER SCALE;

OPTICAL LOSSES;

COPPER;

ARTICLE; CHEMISTRY; ENERGY TRANSFER; EQUIPMENT; EQUIPMENT DESIGN; INSTRUMENTATION; LIGHT; RADIATION SCATTERING; REFRACTOMETRY; SEMICONDUCTOR; SURFACE PLASMON RESONANCE;

COPPER; ENERGY TRANSFER; EQUIPMENT DESIGN; EQUIPMENT FAILURE ANALYSIS; LIGHT; REFRACTOMETRY; SCATTERING, RADIATION; SURFACE PLASMON RESONANCE; TRANSISTORS, ELECTRONIC;

EID: 84863738699     PISSN: None     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OE.20.013612     Document Type: Article

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