Enhanced fiber grating coupler integrated by wafer-to-wafer bonding

Journal of Lightwave Technology

Volumn 29, Issue 12, 2011, Pages 1847-1851

  Kopp, Christophe ^a   Augendre, Emmanuel ^a   Orobtchouk, Regis ^b   Lemonnier, Olivier ^a   Fedeli, Jean Marc ^a  

^a CEA GRENOBLE   (France)

^b INSTITUT DES NANOTECHNOLOGIES DE LYON   (France)

Author keywords

Hybrid integrated circuit packaging; optical fiber couplers; photonic integration; silicon on insulator (SOI)

Indexed keywords

COUPLING EFFICIENCY; ENCAPSULATION LAYER; FIBER GRATINGS; GRATING COUPLERS; GRATING STRUCTURES; HYBRID INTEGRATED CIRCUIT PACKAGING; IC CHIPS; IC WAFERS; INTEGRATION PROCESS; METALIZATIONS; OPTICAL FIBER COUPLERS; OPTICAL FUNCTION; OPTICAL LAYERS; PHOTONIC INTEGRATION; SENSITIVE PARAMETER; SILICON LAYER; SILICON PHOTONICS; SILICON WIRES; SILICON-ON-INSULATORS; WAFER TO WAFER BONDING;

ELECTRONICS PACKAGING; FIBERS; HYBRID INTEGRATED CIRCUITS; INTEGRATION; MIRRORS; OPTICAL FIBERS; PHOTONIC INTEGRATION TECHNOLOGY; SILICON WAFERS;

WAFER BONDING;

EID: 79958060219     PISSN: 07338724     EISSN: None     Source Type: Journal    
DOI: 10.1109/JLT.2011.2146755     Document Type: Article

References (16)

1. J. M. Fedeli, R. Orobtchouk, C. Seassal, and L. Vivien, "Integration issues of a photonic layer on top of a CMOS circuit," Proc. SPIE, vol. 6125, pp. 97-111, 2006.
2. J. M. Fedeli, L. Di Cioccio, D. Marris-Morini, L. Vivien, R. Orobtchouk, P. Rojo-Romeo, C. Seassal, and F. Mandorlo, "Development of silicon photonics devices using microelectronic tools for the integration on top of a CMOS wafer," Adv. Opt. Technol., vol. 2008, p. 15, 2008, Art. ID 412518.
3. R. Baets, P. Dumon, W. Bogaerts, G. Roelkens, D. Taillaert, B. Luys-saert, G. Priem, G. Morthier, P. Bienstman, and D. Van-Thourhout, "Silicon-on-insulator based nano-photonics: Why, how, what for," in Proc. IEEE 2nd Int. Conf. Group IV 05EX1053, 2005, pp. 168-170. (Pubitemid 44172693)
4. R. Baets, P. Dumon, W. Bogaerts, G. Roelkens, D. Taillaert, B. Luys-saert, G. Priem, G. Morthier, P. Bienstman, and D. Van Thourhout, "Silicon-on-insulator based nano-photonics: Why, how, what for?," in Proc. IEEE 2nd Int. Conf. Group IV Photon., 2005, pp. 168-170. (Pubitemid 44172693)
5. J. M. Fedeli, M. Migette, L. Di Cioccio, L. El Melhaoui, R. Orobtchouk, C. Seassal, P. RojoRomeo, F. Mandorlo, D. Marris-Morini, and L. Vivien, "Incorporation of a photonic layer at the metallizations levels of a CMOS circuit," in Proc. IEEE 3rd Int. Conf. Group IV Photon., 2006, pp. 200-202.
6. T. Pinguet, B. Analui, E. Balmater, D. Guckenberger, M. Harrison, R. Koumans, D. Kucharski, Y. Liang, G. Masini, A. Mekis, S. Mir-saidi, A. Narasimha, M. Peterson, D. Rines, V. Sadagopan, S. Sahni, T. J. Sleboda, D. Song, Y. Wang, B. Welch, J. Witzens, J. Yao, S. Ab-dalla, S. Gloeckner, and P. De Dobbelaere, "Monolithically integrated high-speed CMOS photonic transceivers," in Proc. IEEE 5th Int. Conf. Group IV Photon., 2008, pp. 362-364.
7. J. M. Fedeli, L. Fulbert, D. Van Thourhout, P. Viktorovitch, I. O'Connor, G. H. Duan, G. Reed, F. Della Corte, L. Vivien, F. L. Royo, L. Pavesi, B. Garrido, E. Grard, B. Tillack, L. Zimmermann, S. Formont, A. Hakansson, E. Wachmann, H. Zimmermann, A. Bakker, and H. Porte, "HELIOS: Photonics electronics functional integration on CMOS," presented at the presented at the SPIE, vol. 7719, Brussels, Belgium, 2010.
8. A. Mekis, S. Gloeckner, G. Masini, A. Narasimha, T. Pinguet, S. Sahni, and P. Dobbelaere, "A grating-coupler-enabled CMOS photonics platform," IEEE J. Sel. Top. Quantum Electron., to be published.
9. C. Kopp and A. Chelnokov, "Fiber grating couplers for silicon nanophotonic circuits: Design modeling methodology and fabrication tolerances," Opt. Commun., vol. 282, no. 21, pp. 4242-4248, 2009.
10. [Online]. Available: http://www.epixfab.eu/
11. D. Taillaert et al., "Grating couplers for coupling between optical fibres and nanophotonic waveguides," Jpn. J. Appl. Phys., vol. 45, no. 8A, pp. 6071-6077, 2006. (Pubitemid 44366829)
12. R. Orobtchouk, A. Layadi, H. Gualous, D. Pascal, A. Koster, and S. Laval, "High efficiency light coupling in a submicron SOI waveguide," Appl. Opt., vol. 39, no. 31, pp. 5773-5777, 2000.
13. F. Van Laere, G. Roelkens, J. Schrauwen, D. Taillaert, P. Dumon, W. Bogaerts, D. Van Thourhout, and R. Baets, "Compact grating couplers between optical fibers and silicon-on-insulator photonic wire waveguides with 69% coupling efficiency," presented at the presented at the Optical Fiber Communication, 2006, Paper PDP15.
14. J. M. Fedeli, "Si and InP integration in the HELIOS project," in Proc. 35th Eur. Conf. on Opt. Commun., 2009, p. 3.
15. D. Vermeulen, S. Selvaraja, P. Verheyen, G. Lepage, W. Bogaerts, and G. Roelkens, "High-efficiency silicon-on-insulator fiber-to-chip grating couplers using a silicon overlay," Opt. Exp., vol. 18, no. 17, pp. 18278-18283, 2010.
16. X. Chen, C. Lia, and H. K. Tsang, "Two dimensional silicon waveguide chirped grating couplers for vertical optical fibers," Opt. Commun., vol. 283, no. 10, pp. 2146-2149, May 15, 2010.