High-angular-range electrostatic rotary stepper micromotors fabricated with SOI technology

Journal of Microelectromechanical Systems

Volumn 21, Issue 3, 2012, Pages 605-620

  Stranczl, Marc ^a   Sarajlic, Edin ^b   Fujita, Hiroyuki ^c   Gijs, Martin A M ^a   Yamahata, Christophe ^a  

^a EPFL   (Switzerland)

^b SmartTip BV   (Netherlands)

^c INSTITUTE OF INDUSTRIAL SCIENCE   (Japan)

Author keywords

Active joint; differential capacitive sensor; electrostatic rotary stepper micromotor; flexural pivot; folded beam suspension; microrobotics; modal analysis; silicon on insulator (SOI); variable capacitance micromotor

Indexed keywords

DIFFERENTIAL CAPACITIVE SENSORS; FLEXURAL PIVOT; FOLDED-BEAM; MICRO ROBOTICS; MICROMOTOR; SILICON-ON-INSULATORS; VARIABLE-CAPACITANCE MICROMOTOR;

CAPACITIVE SENSORS; ELECTROMECHANICAL DEVICES; ELECTROSTATICS; FABRICATION; FINITE ELEMENT METHOD; MEMS; MICROMOTORS; MODAL ANALYSIS; SILICON ON INSULATOR TECHNOLOGY; THREE DIMENSIONAL; THREE DIMENSIONAL COMPUTER GRAPHICS;

SUSPENSIONS (COMPONENTS);

EID: 84861889916     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2012.2189367     Document Type: Article

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