Design of an electrostatic rotary comb actuator

Journal of Microlithography, Microfabrication and Microsystems

Volumn 5, Issue 2, 2006, Pages

  Andrew Yeh, J ^a   Huang, Jing Yi ^a   Chen, Chi Nan ^a   Hui, Chung Yuen ^b  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

^b Department of Obstetrics Gynecology   (United States)

Author keywords

Central rings; Complex numbers; Rotary comb; Rotation

Indexed keywords

CENTRAL RINGS; COMPLEX NUMBERS; ROTARY COMB;

COMPUTER SIMULATION; ELECTRIC FIELDS; LINEAR SYSTEMS; NATURAL FREQUENCIES; PARAMETER ESTIMATION; ROTATION;

ACTUATORS;

EID: 33748562135     PISSN: 15371646     EISSN: None     Source Type: Journal    
DOI: 10.1117/1.2198532     Document Type: Article

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