Large rotation actuated by in-plane rotary comb-drives with serpentine spring suspension

Journal of Micromechanics and Microengineering

Volumn 15, Issue 1, 2005, Pages 201-206

  Yen, J Andrew ^a   Chen, Chi Nung ^a   Lui, Yen Seng ^a  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

DEFORMATION; ELASTIC MODULI; ELECTRIC POTENTIAL; ELECTROSTATICS; MATHEMATICAL MODELS; MECHANICAL DRIVES; MICROELECTROMECHANICAL DEVICES; NATURAL FREQUENCIES; ROTATION; SERPENTINE; SPRINGS (COMPONENTS); STIFFNESS;

ELECTROMECHANICAL ENERGY; ELECTROSTATIC ENERGY; ROTARY COMB-DRIVES; SPRING CONSTANT;

ROTATING MACHINERY;

EID: 12444330983     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/15/1/028     Document Type: Article

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