A MEMS rotary comb mechanism for harvesting the kinetic energy of planar vibrations

Journal of Micromechanics and Microengineering

Volumn 20, Issue 6, 2010, Pages

  Yang, Bin ^a   Lee, Chengkuo ^a,b   Kotlanka, Rama Krishna ^b   Xie, Jin ^b   Lim, Siak Piang ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

^b INSTITUTE OF MICROELECTRONICS   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

AIR DAMPING; AMBIENT VIBRATIONS; DEEP SILICON ETCHING; DESIGN AND SIMULATION; ELECTRICAL OUTPUT; ENERGY HARVESTER; IN-PLANE; IN-VACUUM; LOADING RESISTANCE; LOW FREQUENCY; METAL CAP; OUTPUT POWER; PARASITIC RESISTANCES; PLANAR VIBRATION; RESONANT FREQUENCIES; SILICON ON INSULATOR; TESTING RESULTS; VACUUM LEVEL;

ELECTRON ENERGY LOSS SPECTROSCOPY; HARVESTERS; KINETIC ENERGY; NATURAL FREQUENCIES; SEMICONDUCTING SILICON COMPOUNDS; SILICON ON INSULATOR TECHNOLOGY; SILICON WAFERS; VACUUM;

ENERGY HARVESTING;

EID: 78650892172     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/20/6/065017     Document Type: Article

References (55)

1. Beeby S P, Tudor M J and White N M 2006 Energy harvesting vibration sources for microsystems applications Meas. Sci. Technol. 17 R175-95
2. Arnold D P 2007 Review of microscale magnetic power generation IEEE Trans. Magn. 43 3940-51
3. Hudak N S and Amatucci G G 2008 Small-scale energy harvesting through thermoelectric, vibration, and RF power conversion J. Appl. Phys. 103 101301
4. Roundy S, Wright P K and Rabaey J 2003 A study of low level vibrations as a power source for wireless sensor nodes Comput. Commun. 26 1131-44
5. Torah R, Glynne-Jones P, Tudor M, O'Donnell T, Roy S and Beeby S P 2008 Self-powered autonomous wireless sensor node using vibration energy harvesting Meas. Sci. Technol. 19 125202
6. Torfs T, Leonov V and Vullers R J M 2007 Pulse oximeter fully powered by human body heat Sensors Transducers 80 1230-8
7. Huesgen T, Woias P and Kockmann N 2008 Design and fabrication of MEMS thermoelectric generators with high temperature efficiency Sensors Actuators A 145-146 423-9
8. Yang S M, Lee T and Jeng C A 2009 Development of a thermoelectric energy harvester with thermal isolation cavity by standard CMOS process Sensors Actuators A 153 244-50
9. Wang Z, Fiorini P, Leonov V and Hoof C V 2009 Characterization and optimization of polycrystalline Si70%Ge30% for surface micromachined thermopiles in human body applications J. Micromech. Microeng. 19 094011
10. Xie J, Lee C, Wang M F, Liu Y and Feng H H 2009 Characterization of heavily doped polysilicon films for CMOS-MEMS thermoelectric power generators J. Micromech. Microeng. 19 125029
11. Menigner S, Mur-Miranda J O, Amirtharajah R, Chandrakasan A P and Lang J H 2001 Vibration-to-electric energy conversion IEEE Trans. Very Large Scale Integr. (VLSI) Syst. 9 64-76
12. Mitcheson P D, Miao P, Stark B H, Yeatman E M, Holmes A S and Green T C 2004 MEMS electrostatic micropower generator for low frequency operation Sensors Actuators A 115 523-9
13. Kuehne I, Frey A, Marinkovic D, Eckstein G and Seidel H 2008 Power MEMS-A capacitive vibration-to-electrical energy converter with built-in voltage Sensors Actuators A 142 263-9
14. Chiu Y and Tseng V F G 2008 A capacitive vibration-to-electricity energy converter with integrated mechanical switches J. Micromech. Microeng. 18 104004
15. Bartsch U, Gaspar J and Paul O 2010 Low-frequency two-dimensional resonators for vibrational micro energy harvesting J. Micromech. Microeng. 20 035016
16. Glynne-Jones P, Tudor M J, Beeby S P and White N M 2004 An electromagnetic, vibration-powered generated for intelligent sensor systems Sensors Actuators A 110 344-9
17. Beeby S P, Torah R N, Tudor M J, Glynne-Jones P, O'Donnell T, Saha C R and Roy S 2007 A micro electromagnetic generator for vibration energy harvesting J. Micromech. Microeng. 17 1257-65
18. Sari I, Balkan T and Kulah H 2008 A electromagnetic micro power generator for wideband environmental vibrations Sensors Actuators A 145 405-13
19. Yang B, Lee C, Xiang W F, Xie J, He H, Kotlanka R K, Low S P and Feng H H 2009 Electromagnetic energy harvesting from vibrations of multiple frequencies J. Micromech. Microeng. 19 035001
20. Sari I, Balkan T and Kulah H 2009 An electromagnetic micro energy harvester based on an array of parylene cantilevers J. Micromech. Microeng. 19 105023
21. Lu F, Lee H P and Lim S P 2004 Modeling and analysis of micro piezoelectric power generators for micro-electromechanical-systems applications Smart Mater. Struct. 13 57-63
22. Jeon Y, Sood R, Jeong J H and Kim S G 2005 MEMS power generator with transverse mode thin film PZT Sensors Actuators A 122 16-22
23. Shen D N, Park J H, Ajitsaria J, Choe S Y, H CWIII and Kim D J 2008 The design, fabrication and evaluation of a MEMS PZT cantilever with integrated Si proof mass for vibration energy harvesting J. Micromech. Microeng. 18 055017
24. Renaud M, Karakaya K, Sterken T, Fiorini P, Van Hoof C and Puers R 2008 Fabrication, modelling and characterization of MEMS piezoelectric vibration harvesters Sensors Actuators A 145-146 380-6
25. Elfrink R, Kamel T M, Goedbloed M, Matova S, Hohlfeld D, Van Andel Y and Van Schaijk R 2009 Vibration energy harvesting with aluminum nitride-based piezoelectric devices J. Micromech. Microeng. 19 094005
26. Hoffmann D, Folkmer B and Manoli Y 2009 Fabrication, characterization and modelling of electrostatic micro-generators J. Micromech. Microeng. 19 094001
27. Lee C, Lim Y M, Yang B, Kotlanka R K, Heng C H, He H, Tang M, Xie J and Feng H H 2009 Theoretical comparison of the energy harvesting capability among various electrostatic mechanisms from structure aspect Sensors Actuators A 156 208-16
28. Chiu Y, Kuo C T and Chu Y S 2007 MEMS design and fabrication of an electrostatic vibration-to-electricity energy converter Microsyst. Technol. 13 1663-9
29. Despesse G, Jager T, Chaillout J J, Léger J M, Vassilev A, Basrour S and Charlot B 2005 Fabrication and characterization of high damping electrostatic micro devices for vibration energy scavenging Proc. DTIP'05 pp 386-90
30. Basset P, Galayko D, Mahmood Paracha A, Marty F, Dudka A and Bourouina T 2009 A batch-fabricated and electret-free silicon electrostatic vibration energy harvester J. Micromech. Microeng. 19 115025
31. Mahmood Paracha A, Basset P, Galayko D, Marty F and Bourouina T 2009 A silicon MEMS DC/DC converter for autonomous vibration-to-electrical-energy scavenger IEEE Electron. Device Lett. 30 481-3
32. Boland J, Chao C-H, Suzuki Y and Tai Y-C 2003 Micro electret power generator 16th IEEE Int. Conf. MEMS (Kyoto) pp 538-41
33. Sterken T, Fiorini P, Baert K, Puers R and Borghs G 2003 An electret-based electrostatic μ-generator Proc. Transducers'03 (8-12 June) pp 1291-4
34. Arakawa Y, Suzuki Y and Kasagi N 2004 Micro seismic power generator using electret polymer film Power MEMS Conf (Kyoto, Japan) pp 187-90
35. Tsutsumino T, Suzuki Y, Kasagi N and Sakane Y 2006 Seismic power generator using high-performance polymer electret 19th IEEE Int. Conf. MEMS '06 (Istanbul) pp 98-101
36. Ma W, Zhu R, Rufer L, Zohar Y and Wong M 2007 An integrated floating-electrode electric microgenerator J. Microelectromech. Syst. 16 29-37
37. Lo H-W and Tai Y-C 2008 Parylene-based electret power generators J. Micromech. Microeng. 18 104006
38. Sakane Y, Suzuki Y and Kasagi N 2008 The development of a high-performance perfluorinated polymer electret and its application to micro power generation J. Micromech. Microeng. 18 104011
39. Naruse Y, Matsubara N, Mabuchi K, Izumi M and Suzuki S 2009 Electrostatic micro power generation from low-frequency vibration such as human motion J. Micromech. Microeng 19 094002
40. Yeatman E M 2008 Energy harvesting from motion using rotating and gyroscopic proof masses Proc. Inst. Mech. Eng. C 222 27-36
41. Bartsch U, Gaspar J and Paul O 2009 A 2D electret-based resonant micro energy harvester Proc. IEEE MEMS Conf. (Sorrento, Italy) pp 1043-6
42. Jill J D, Zhang Y, Grade J D, Lee H, Hrinya S and Jerman H 2001 Widely tunable external cavity diode laser based on a MEMS electrostatic rotary actuator IEEE Proc. Opt. Fiber Commun. Conf. Exhibit (Optical Society of America, Washington, DC, 2001) vol 2 TuJ2-1-TuJ2-3
43. Yeh J A, Chen C N and Lui Y S 2005 Large rotation actuated by in-plane rotary comb-drive with serpentine spring suspension J. Micromech. Microeng. 15 201-6
44. Lim T S, Ji C H, Oh C H, Kwon H, Yee Y and Bu J U 2004 Electrostatic MEMS variable optical attenuator with rotating folded micromirror IEEE J. Sel. Top. Quantum Electron. 10 558-62
45. Yeh J A, Jiang S S and Lee C 2006 MOEMS variable optical attenuators using rotary comb drive actuators IEEE Photonics Technol. Lett. 18 1170-2
46. Tu C C, Fanchiang K and Liu C H 2006 Rotary electrostatic micromirror switches using wafer-scale processing and assembly Microsyst. Technol. 12 1099-108
47. Hou Max T K, Huang J Y, Jiang S S and Yeh J A 2008 In-plane rotary comb-drive actuator for a variable optical attenuator J. Micro/Nanolith. MEMS MOEMS 7 043015
48. Roundy S, Wright P K and Rabaey J M 2003 Energy Scavenging for Wireless Sensor Networks with Special Focus on Vibrations (Dordrecht: Kluwer)
49. Mitcheson P D, Reilly E K, Toh T, Wright and Yeatman E M 2007 Performance limits of the three MEMS inertial energy generator transduction types J. Micromech. Microeng. 17 S211-6
50. Den Hartog J P 1985 Mechanical Vibrations (Mineola, NY: Dover)
51. Hosaka H, Itao K and Kuroda S 1995 Damping characteristics of beam-shaped micro-oscillators Sensors Actuators A 49 87-95
52. Corman T, Enoksson P and Stemme G 1997 Gas damping of electrostatically excited resonators Sensors Actuators A 61 249-55
53. Mohite S S, Kesari H, Sonti V R and Pratap 2005 Analytical solutions for the stiffness and damping coefficients of squeeze films in MEMS devices with perforated back plates J. Micromech. Microeng. 15 2083-92
54. Mitcheson P, Stark B, Miao P, Yeatman E, Holmes A and Green T 2003 Analysis and optimization of MEMS on-chip power supply for self powering of slow moving sensors Proc. Eurosensors XVII (Guimaraes, Portugal) pp 30-1
55. Mizuno M and Chetwynd D G 2003 Investigation of a resonance microgenerator J. Micromech. Microeng. 13 209-16