Subnanometer translation of microelectromechanical systems measured by discrete fourier analysis of CCD images

Journal of Microelectromechanical Systems

Volumn 19, Issue 5, 2010, Pages 1273-1275

  Yamahata, Christophe ^a   Sarajlic, Edin ^b   Krijnen, Gijs J M ^c   Gijs, Martin A M ^a  

^a EPFL   (Switzerland)

^b SmartTip BV   (Netherlands)

^c UNIVERSITY OF TWENTE   (Netherlands)

Author keywords

Discrete Fourier transform (DFT); optical measurement; phase correlation; subpixel resolution

Indexed keywords

BULK-MICROMACHINED; CAPACITIVE SENSOR; CCD IMAGES; CHARGE-COUPLED DEVICE CAMERA; DISCRETE FOURIER TRANSFORM ANALYSIS; IN-PLANE; LINEAR DISPLACEMENTS; MEASUREMENT RESOLUTION; MICRO ELECTRO MECHANICAL SYSTEM; MICROPATTERNS; OPTICAL MEASUREMENT; OPTICAL MICROSCOPES; PERIODIC MICROSTRUCTURE; PHASE CORRELATION; SILICON DEVICES; STANDARD DEVIATION; SUBNANOMETERS; SUBPIXEL RESOLUTION; VIBRATION ISOLATIONS;

BLOCK CODES; COMPOSITE MICROMECHANICS; DISCRETE FOURIER TRANSFORMS; FOURIER ANALYSIS; MECHATRONICS; MEMS; MICROELECTROMECHANICAL DEVICES; MICROSTRUCTURE; OPTICAL VARIABLES MEASUREMENT;

OPTICAL CORRELATION;

EID: 77957568853     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2010.2067445     Document Type: Article

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