Nanomanipulation in a scanning electron microscope

Journal of Materials Processing Technology

Volumn 167, Issue 2-3, 2005, Pages 371-382

  Fahlbusch, St ^a   Mazerolle, S ^b   Breguet, J M ^b   Steinecker, A ^c   Agnus, J ^d   Perez R ^d   Michler, J ^a  

^a SWISS FEDERAL LABORATORIES FOR MATERIALS SCIENCE AND TECHNOLOGY   (Switzerland)

^b EPFL   (Switzerland)

^c CSEM   (Switzerland)

^d CNRS   (France)

Author keywords

Carbon nanotubes; Microgripper; Nanomanipulation; Nanotools; Scanning electron microscope; Visual control

Indexed keywords

ATOMIC FORCE MICROSCOPY; ATOMS; CARBON NANOTUBES; MOLECULES; NANOTECHNOLOGY; SELF ASSEMBLY; X RAYS;

NANOMANIPULATION; NANOTOOLS; POWDER PARTICLES; VISUAL CONTROL;

SCANNING ELECTRON MICROSCOPY;

EID: 23844470617     PISSN: 09240136     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jmatprotec.2005.06.022     Document Type: Article

References (52)

1. O. Kraft, and C. Volkert Mechanical testing of thin films and small structures Adv. Eng. Mater. 3 3 2001 99 110
2. Y. Hatamura, and H. Morishita Direct coupling system between nanometer world and human world Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems Napa Valley, USA 1990 203 208
3. G. Binnig, and H. Rohrer Scanning tunneling microscopy Helvet. Phys. Acta 55 1982 726 735
4. Royal Swedish Academy of Sciences: The Nobel Prize in Physics, Press Release, http://nobelprize.org/physics/laureates/1986/press.html, 1986.
5. G. Binning, C.F. Quate, and Ch. Gerber Atomic force microscope Phys. Rev. Lett. 56 1986 930 933
6. D.M. Eigler, and E.K. Schweizer Positioning single atoms with a scanning tunneling microscope Nature 344 6266 1990 524 526
7. T. Junno, K. Deppert, L. Montelius, and L. Samuelson Controlled manipulation of nanoparticles with an atomic force microscope Appl. Phys. Lett. 66 26 1995 3627 3629
8. D.M. Schaefer, R. Reifenberger, A. Patil, and R.P. Andres Fabrication of two-dimensional arrays of nanometer-size clusters with the scanning probe microscope Appl. Phys. Lett. 66 1995 1012 1014
9. A. Requicha, C. Baur, A. Bugacov, B. Gazen, B. Koel, A. Madhukar, T. Ramachandran, R. Resch, and P. Will Nanorobotic assembly of two-dimensional structures Proceedings of the IEEE International Conference on Robotics and Automation Leuven, Belgium 1998 3368 3374
10. L. Theil-Hansenyk, A. Kuehle, A. Sørensenz, J. Bohr, and P. Lindelofy A technique for positioning nanoparticles using an atomic force microscope Nanotechnology 9 1998 337 342
11. G. Li, N. Xi, M. Yu, and W. Fung 3-D nanomanipulation using scanning probe microscopy Proceedings of the IEEE International Conferene on Robotics and Automation Taipei, Taiwan 2003 3642 3647
12. M. Sitti, and H. Hashimoto Tele-nanorobotics using scanning probe microscope Proceedings of the IEEE/RSJ International Conference on Intelligent Robots and Systems Victoria, Canada 1998 1739 1746
13. M. Guthold, M.R. Falvo, W.G. Matthews, S. Paulson, S. Washburn, D.A. Erie, R. Superfine, F.P. Brooks, and R.M. Taylor Controlled manipulation of molecular samples with the nanoManipulator IEEE/ASME Trans. Mechatron. 5 2 2000 189 198
14. T. Sato, T. Kameya, H. Miyazaki, and Y. Hatamura Hand-eye system in nano manipulation world Proceedings of the IEEE International Conference on Robotics and Automation, vol. 1 1995 59 66
15. T. Kasaya, H. Miyazaki, S. Saito, and T. Sato Micro object handling under SEM by vision-based automatic control Microrobotics and Micromanipulation, Proccedings of SPIE 3519 1998 181 192
16. M. Weck, J. Huemmler, and B. Petersen Assembly of hybrid microsystems in a large-chamber scanning electron microscope by use of mechanical grippers Micromachining and Microfabrication Process Technology III, Proceedings of SPIE, 3223 1997 223 229
17. M.F. Yu, M.J. Dyer, G.D. Skidmore, H.W. Rohrs, X.K. Lu, K.D. Ausman, J.R. Von Ehr, and R.S. Ruoff Three dimensional manipulation of carbon nanotubes under a scanning electron microscope Nanotechnology 10 3 1999 244 252
18. T. Fukuda, F. Arai, and L. Dong Assembly of nanodevices with carbon nanotubes through nanorobotic manipulation Proceedings of the IEEE 91(11) 2003 1803 1818
19. E. Drexler Nanosystems: Molecular Machinery, Manufacturing, and Computation 1992 John Wiley & Sons
20. S. Fatikow, A. Kortschack, H. Hülsen, T. Sievers, and T. Wich Towards fully automated microhandling Proceedings of the International Workshop on Microfactories Shanghai, China 2004
21. S. Johansson Hybrid techniques in microrobotics Proceedings of the IARP Workshop on Micro Robotics and Systems Karlsruhe 1993 72 83
22. Y. Yamamoto, R. Konishi, Y. Negishi, and M. Arakawa Tool development for force-feedback micromanipulation system Proceedings of the IEEE/RSJ International Conference on Intelligent Robots and Systems Las Vegas, USA 2003 2254 2259
23. Y. Nakayama, and S. Akita Nanoengineering of carbon nanotubes for nanotools New J. Phys. 5 2003 128.1-128.23
24. K. Mølhave, T.M. Hansen, D. Nørgaard Madsen, and P. Bøggild Towards pick-and-place assembly of nanostructures Nanosci. Nanotechnol. 4 3 2004 279 282
25. Zyvex Corp., http://www.zyvex.com, USA.
26. Klocke Nanotechnik, http://www.nanomotor.de, Germany.
27. Kleindiek Nanotechnik, http://www.nanotechnik.com, Germany.
28. Attocube systems, http://www.attocube.com, Germany.
29. A. Kikukawa, S. Hosaka, Y. Honda, and H.J. Koyanagi Magnetic force microscope combined with a scanning electron microscope Vac. Sci. Technol. A 11 6 1993 3092 3098
30. U. Stahl, C. Yuan, A. de Lozanne, and M. Tortonese Scanning probe microscope using piezoresistive cantilevers and combined with a scanning electron microscope Appl. Phys. Lett. 65 22 1994 2878 2880
31. A.V. Ermakov, and E.L. Garfunkel A novel SPM/STM/SEM system Rev. Sci. Instrum. 65 9 1994 2853 2854
32. M. Troyon, H.N. Lei, Z. Wang, and G. Shang A scanning force microscope combined with a scanning electron microscope for multidimensional data analysis Micros. Microanal. Microstruct. 8 1997 393 402
33. K. Fukushima, S. Kawai, D. Saya, and H. Kawakatsu Measurement of mechanical properties of three-dimensional nanometric objects by an atomic force microscope incorporated in a scanning electron microscope Rev. Sci. Instrum. 73 7 2002 2647 2650
34. I. Joachimsthaler, R. Heiderhoff, and L. Balk A universal scanning-probe-microscope based hybrid system Meas. Sci. Technol. 14 2003 87 96
35. Topometrix (now Veeco Instruments) Observer, http://www.veeco.com, USA.
36. Nanonics Imaging, http://www.nanonics.co.il, Israel.
37. P. Williams, S. Papadakis, M. Falvo, A. Patel, M. Sinclair, A. Seeger, A. Helser, R. Taylor, S. Washburn, and R. Superfine Controlled placement of an individual carbon nanotube onto a microelectromechanical structure Appl. Phys. Lett. 80 14 2002 2574 2576
38. J.-M. Breguet, and P. Renaud A 4-degrees-of-freedom microrobot with nanometer resolution Robotica 14 1996 199 203
39. S. Mazerolle, R. Rabe, S. Fahlbusch, J. Michler, and J.-M. Breguet High precision robotics system for scanning electron microscopes Proceesdings of the International Workshop on Microfactories Shanghai, China 2004
40. S. Mazerolle, R. Rabe, T. Varidel, A. Bergander, and J.-M. Breguet High thrust force linear actuators Proceedings of the International Symposium on Robotics Paris, France 2004
41. 2 interface used for selective electrodeposition of nanowires Electrochem. Solid-State Lett. 7 3 2004 A41 A43
42. V. Friedli, I. Utke, J. Michler, and P. Hoffmann In-situ mass detection during focused electron beam induced deposition Proceedings of the 21st Annual SAOG Meeting on Advanced Nano Probe Techniques Fribourg, Switzerland 2005
43. J. Agnus, P. De Lit, C. Clévy, and N. Chaillet Description and performances of a four degree-of-freedom piezoelectric gripper Proceedings of the International Symposium on Assembly and Task Planning Besançon, France 2003 66 71
44. Point electronic, http://www.pointelectronic.de, Germany.
45. Matrox, http://www.matrox.com/imaging/products/mil/home.cfm, USA.
46. R. Stevens, N. Frederick, B. Smith, D. Morse, G. Stucky, and P. Hansma Carbon nanotubes as probes for atomic force microscopy Nanotechnology 11 2000 1 5
47. J.M. Bonard, J.P. Salvetat, T. Stoeckli, W.A. de Heer, L. Forro, and A. Chatelain Field emission from single-wall carbon nanotube films Appl. Phys. Lett. 73 1998 918 920
48. N. de Jonge, Y. Lamy, and M. Kaiser Controlled mounting of individual multiwalled carbon nanotubes on support tips Nano Lett. 3 12 2003 1621 1624
49. K. Yamamoto, S. Akita, and Y. Nakayama Orientation and purification of carbon nanotubes using ac electrophoresis Physics D 31 8 1998 34 36
50. Y. Keles, M. Milas, V. Thommen, St. Fahlbusch, Th. Stoeckli, E. Meyer, L. Forró, and H. Knapp Controlled growth of carbon nanotubes on microstructured surfaces Proceedings of the IEEE Conference on Nanotechnology Munich, Germany 2004 538 540
51. H. Dai, J. Hafner, A. Rinzler, D. Colbert, and R. Smalley Nanotubes as nanoprobes in scanning probe microscopy Nature 384 1996 147 150
52. C. Cheung, J.H. Hafner, and C.M. Lieber Direct growth of single walled carbon nanotube probe tips J. Am. Chem. Soc. 121 1999 9750 9751