An electrostatic 3-phase linear stepper motor fabricated by vertical trench isolation technology

Journal of Micromechanics and Microengineering

Volumn 19, Issue 7, 2009, Pages

  Sarajlic, Edin ^b   Yamahata, Christophe ^c   Cordero, Mauricio ^a   Fujita, Hiroyuki ^a  

^a INSTITUTE OF INDUSTRIAL SCIENCE   (Japan)

^b SmartTip BV   (Netherlands)

^c EPFL   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATION VOLTAGES; ELECTRICAL NETWORKS; HIGH ASPECT RATIO; MECHANICAL CONTACT; MICROMOTOR; SINGLE-CRYSTAL SILICON WAFERS; STEP SIZE; STEPPER MOTOR; STEPPING MOTION; TRENCH ISOLATION;

ASPECT RATIO; ELECTRIC POTENTIAL; ELECTROSTATICS; SEMICONDUCTING SILICON COMPOUNDS; SILICON WAFERS; STEPPING MOTORS;

MOTORS;

EID: 67849106663     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/19/7/074001     Document Type: Article

References (18)

1. Trimmer W S N and Gabriel K J 1987 Design considerations for a practical electrostatic micro-motor Sensors Actuators 11 189-206
2. Fan L-S, Tai Y-C and Muller R S 1988 IC-processed electrostatic micro-motors Tech. Dig. Int. Electron Devices Meeting (IEDM 88) (San Francisco, CA) pp 666-9
3. Mehregany M, Nagarkar P, Senturia S D and Lang J H 1990 Operation of microfabricated harmonic and ordinary side-drive motors Proc. IEEE Micro Electro Mechanical Systems Workshop (MEMS 90) (Napa Valley, CA) pp 1-8
4. Mehregany M, Bart S F, Tavrow L S, Lang J H, Senturia S D and Schlecht M F 1990 A study of three microfabricated variable-capacitance motors Sensors Actuators A 21 173-9
5. Mehregany M and Tai Y-C 1991 Surface micromachined mechanisms and micromotors J. Micromech. Microeng. 1 73-85
6. Kraus Th, Baltzer M and Obermeier E 1997 Design and fabrication of surface micromachined micromotors with large dimensions J. Micromech. Microeng. 7 196-9
7. Yasseen A A, Smith S W, Merat F L and Mehregany M 1999 Diffraction grating scanners using polysilicon micromotors IEEE J. Sel. Top. Quantum Electron. 5 75-82
8. Yasseen A A, Mitchell J N, Klemic J F, Smith D A and Mehregany M 1999 A rotary electrostatic micromotor 1 × 8 optical switch IEEE J. Sel. Top. Quantum Electron. 5 26-32
9. Suzuki K and Tanigawa H 1991 Single crystal silicon rotational micromotors Proc. IEEE Micro Electro Mechanical Systems Workshop (MEMS 91) (Nara, Japan) pp 15-20
10. Matsubara T, Yamaguchi M, Minami K and Esashi M 1993 Stepping electrostatic microactuator Dig. Tech. Papers Int. Conf. on Solid-State Sensors and Actuators (Transducers 93) (Yokohama, Japan) pp 50-3
11. Legtenberg R, Groeneveld A W and Elwenspoek M 1996 Comb-drive actuators for large displacements J. Micromech. Microeng. 6 320-9
12. Brosnihan T J, Bustillo J M, Pisano A P and Howe R T 1997 Embedded interconnect and electrical isolation for high-aspect-ratio, SOI inertial instruments Proc. Int. Conf. on Solid-State Sensors and Actuators (Transducers 97) (Chicago, IL) vol 1 pp 637-40
13. Sarajlic E, Berenschot E, Krijnen G and Elwenspoek M 2003 Versatile trench isolation technology for the fabrication of microactuators Microelectron. Eng. 67-68 430-7
14. Sarajlic E, de Boer M J, Jansen H V, Arnal N, Puech M, Krijnen G and Elwenspoek M 2004 Advanced plasma processing combined with trench isolation technology for fabrication and fast prototyping of high aspect ratio MEMS in standard silicon wafers J. Micromech. Microeng. 14 S70-S75
15. Vanapalli S 2004 Techniques for characterization of in-plane displacement for microactuators Master's Thesis Department of Electrical Engineering, University of Twente
16. Yamahata C, Sarajlic E, Jalabert L, Kumemura M, Collard D and Fujita H 2009 Mechanical characterization of biomolecules in liquid using silicon tweezers with subnanonewton resolution Proc. 22nd IEEE Int. Conf. on Micro Electro Mechanical Systems (MEMS 2009) (Sorrento, Italy) pp 607-10
17. Bertz A, Küchler M, Knöfler R and Gessner T 2002 A novel high aspect ratio technology for MEMS fabrication using standard silicon wafers Sensors Actuators A 97-8 691-701
18. Grade J D, Jerman H and Kenny T W 2003 Design of large deflection electrostatic actuators J. Microelectromech. Syst. 12 335-43