Single mask 3-phase electrostatic rotary stepper micromotor

TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems

Volumn , Issue , 2009, Pages 1505-1508

  Sarajlic, Edin ^a   Yamahata, Christophe ^b   Cordero, M ^c   Jalabert, L ^d   Iizuka, T ^c   Fujita, H ^c  

^a SmartTip BV   (Netherlands)

^b EPFL   (Switzerland)

^c INSTITUTE OF INDUSTRIAL SCIENCE   (Japan)

^d UNIVERSITY OF TOKYO   (Japan)

Author keywords

Electrostatic stepper micromotor; Flexure pivot; Rotary micromotor; Silicon micromachining; Virtual pivot

Indexed keywords

DATA TRACKS; EXPERIMENTAL CHARACTERIZATION; HARD DISK DRIVE; MECHANICAL CONTACT; MICROMOTOR; MONOLITHIC DEVICES; RADIAL POSITION; SILICON MICROMACHINING; SILICON ON INSULATOR; SINGLE CRYSTAL SILICON; SINGLE-MASK; SINGLE-MASK PROCESS; STEPPING MOTION;

ACTUATORS; COMPOSITE MICROMECHANICS; ELECTROSTATICS; HARD DISK STORAGE; MICROMACHINING; MICROSYSTEMS; PIEZOELECTRIC TRANSDUCERS;

SOLID-STATE SENSORS;

EID: 71449096363     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2009.5285801     Document Type: Conference Paper

References (6)

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