Nanoelectromechanical contact switches

Nature Nanotechnology

Volumn 7, Issue 5, 2012, Pages 283-295

  Loh, Owen Y ^a   Espinosa, Horacio D ^a  

^a Northwestern University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CMOS INTEGRATED CIRCUITS; LOGIC DEVICES; METALS; MOS DEVICES; OXIDE SEMICONDUCTORS; SEMICONDUCTOR DEVICE MANUFACTURE; SEMICONDUCTOR SWITCHES;

COMPLEMENTARY METAL-OXIDE-SEMICONDUCTOR TECHNOLOGIES; CONTACT SWITCHES; EXTREME ENVIRONMENT; LARGE SCALE MANUFACTURE; MANUFACTURING INFRASTRUCTURE; NANO-ELECTROMECHANICAL; OPERATING PRINCIPLES; SWITCH TECHNOLOGIES;

SEMICONDUCTOR RELAYS;

METAL OXIDE; NANOMATERIAL; NANOTUBE;

ARTICLE; DEVICES; NANOELECTROMECHANICAL SYSTEM; NANOTECHNOLOGY; POWER ANALYSIS; PRIORITY JOURNAL; RELIABILITY; SEMICONDUCTOR;

EID: 84861092097     PISSN: 17483387     EISSN: 17483395     Source Type: Journal    
DOI: 10.1038/nnano.2012.40     Document Type: Article

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