Silicon nanowire electromechanical switches for logic device application

Nanotechnology

Volumn 18, Issue 31, 2007, Pages

  Li, Qiliang ^a   Koo, Sang Mo ^b   Edelstein, Monica D ^a   Suehle, John S ^a   Richter, Curt A ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

^b Kwangwoon University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; ELECTRIC SWITCHES; LOGIC DEVICES; NANOWIRES; SILICON;

ELECTROMECHANICAL FORCE; ELECTROMECHANICAL SWITCHES; MATERIAL PROPERTIES; METAL ELECTRODES;

ELECTROMECHANICAL DEVICES;

NANOWIRE; SILICON;

ARTICLE; ELECTRIC POTENTIAL; ELECTRODE; PRIORITY JOURNAL; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTOR;

EID: 34547106578     PISSN: 09574484     EISSN: 13616528     Source Type: Journal    
DOI: 10.1088/0957-4484/18/31/315202     Document Type: Article

References (19)

1. ITRS 2005 Emerging Research Devices
2. Chen R H, Korotkov A N and Likharev K K 1996 Appl. Phys. Lett. 68 1954
3. Fay P, Jiang L, Xu Y, Bernstein G H, Chow D H, Schulman J N, Dunlap H L and De Los Santos H J 2001 IEEE Trans. Electron Devices 48 1282
4. Nikonov D E and Bourianoff G I 2005 IEEE Trans. Nanotechnol. 4 206
5. Seminario J M, Derosa P A, Cordova L E and Bozard B H 2004 IEEE Trans. Nanotechnol. 3 215
6. Li Q, Koo S-M, Richter C A, Edelstein M D, Bonevich J E, Kopanski J J, Suehle J S and Vogel E M 2007 IEEE Trans. Nanotechnol. 6 256
7. Wang Z L, Dai Z R, Gao R P and Gole J L 2002 J. Electron. Microsc. 51 S79
8. Wong E W, Sheehan P E and Lieber C M 1997 Science 277 1971
9. Jang J E, Cha S N, Choi Y, Amaratunga G A J, Kang D J, Hasko D G, Jung J E and Kim J M 2005 Appl. Phys. Lett. 87 163114
10. Wagner R S and Ellis W C 1964 Appl. Phys. Lett. 4 89
11. Givargizov E I 1975 J. Cryst. Growth 31 20
12. Morales A and Lieber C 1998 Science 279 208
13. Morse P M and Feshbach H 1953 Methods of Theoretical Physics vol 2 (New York: McGraw-Hill)
14. Wunnicke O 2006 Appl. Phys. Lett. 89 083102
15. Zheng X J and Zhu L L 2006 Appl. Phys. Lett. 89 153110
16. Gere J M and Timoshenko S P 1991 Mechanics of Materials 3rd edn (Boston, MA: PWS-Kent)
17. Tang Z, Xu Y, Li G and Aluru N R 2005 J. Appl. Phys. 97 114304
18. Menon M, Srivastava D, Ponomareva I and Chernozatonskii L A 2004 Phys. Rev. B 70 125313
19. Taur T and Ning T H 1998 Fundamentals of Modern VLSI Devices (New York: Cambridge University Press)