3-Terminal nanoelectromechanical switching device in insulating liquid media for low voltage operation and reliability improvement

Technical Digest - International Electron Devices Meeting, IEDM

Volumn , Issue , 2009, Pages

  Lee, Jeong Oen ^a   Kim, Min Wu ^a   Ko, Seung Deok ^a   Kang, Hee Oh ^b   Bae, Woo Ho ^b   Kang, Min Ho ^b   Kim, Ki Nam ^b   Yoo, Dong Eun ^b   Yoon, Jun Bo ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

^b National Nano Fab Center (NNFC)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

AIR-GAPS; CMOS COMPATIBLE; DEVICE PERFORMANCE; INSULATING LIQUIDS; LIQUID MEDIUM; LOW VOLTAGE OPERATION; NANO-ELECTROMECHANICAL; OPERATION VOLTAGE; RELIABILITY IMPROVEMENT; SWITCHING CYCLES; SWITCHING DEVICES;

ELECTRON DEVICES; TITANIUM NITRIDE;

LIQUIDS;

EID: 77952400257     PISSN: 01631918     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/IEDM.2009.5424380     Document Type: Conference Paper

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