Fabrication and characterization of a nanoelectromechanical switch with 15-nm -thick suspension air gap

Applied Physics Letters

Volumn 92, Issue 10, 2008, Pages

  Jang, Weon Wi ^a   Lee, Jeong Oen ^a   Yoon, Jun Bo ^a   Kim, Min Sang ^b   Lee, Ji Myoung ^b   Kim, Sung Min ^b   Cho, Keun Hwi ^b   Kim, Dong Won ^b   Park, Donggun ^b   Lee, Won Seong ^b  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

^b SAMSUNG Electronics   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

MEMS; SWITCHING; TITANIUM NITRIDE;

NANOELECTROMECHANICAL (NEM) SWITCH; SUSPENSION AIR GAP;

NEMS;

EID: 40849092892     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2892659     Document Type: Article

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