cBN Synthesis by Bias Assisted Plasma Jet CVD in an Ar-N2-BF3-H2 Gas System

New Diamond and Frontier Carbon Technology

Volumn 11, Issue 1, 2001, Pages 1-10

  Matsumoto, Seiichiro ^a   Zhang, Wenjun ^a  

^a NATIONAL INSTITUTE FOR MATERIALS SCIENCE   (Japan)

Author keywords

Bias; c BN; cBN film; Cubic boron nitride; CVD; dc arc jet; Fluorine; Plasma jet

Indexed keywords

EID: 0347715328     PISSN: 13449931     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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