Recent advances in cubic boron nitride deposition

MRS Bulletin

Volumn 28, Issue 3, 2003, Pages

  Zhang, W J ^a   Bello, Igor ^a   Lifshitz, Yeshayahu ^a   Lee, S T ^a  

^a NONE

Author keywords

Chemical vapor deposition (CVD); Superhard coating materials; Thin films

Indexed keywords

BORON COMPOUNDS; CHEMICAL VAPOR DEPOSITION; CRYSTALS; ION BEAM ASSISTED DEPOSITION; NUCLEATION; STRESS ANALYSIS; THICK FILMS;

SUPERHARD COATING MATERIALS;

PHYSICAL VAPOR DEPOSITION;

EID: 0037345239     PISSN: 08837694     EISSN: None     Source Type: Journal    
DOI: 10.1557/mrs2003.60     Document Type: Review

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