Fabrication of diamond nanopillars and their arrays

Applied Physics Letters

Volumn 92, Issue 5, 2008, Pages

  Zou, Y S ^a   Yang, Y ^a   Zhang, W J ^a   Chong, Y M ^a   He, B ^a   Bello, I ^a   Lee, S T ^a  

^a CITY UNIVERSITY OF HONG KONG   (Hong Kong)

Author keywords

[No Author keywords available]

Indexed keywords

ION BOMBARDMENT; MASKS; NANOSENSORS; REACTIVE ION ETCHING; TEMPERATURE CONTROL;

DIAMOND NANOPILLARS; ETCHING CONDITIONS; ETCHING MASKS;

DIAMOND FILMS;

EID: 38949209066     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2841822     Document Type: Article

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