Field emitter-based vacuum sensors

Vacuum

Volumn 86, Issue 5, 2012, Pages 556-571

  Wilfert, St ^a   Edelmann, Chr ^b  

^a GSI HELMHOLTZZENTRUM FÜR SCHWERIONENFORSCHUNG GMBH   (Germany)

^b OTTO VON GUERICKE UNIVERSITY   (Germany)

Author keywords

Bayard Alpert gauge; Carbon nanotubes (CNTs); Cold cathode; Cold emitter; Diaphragm gauge; Extractor gauge; Field emission; Field emitter; Field emitter array (FEA); Ion gauge; Pirani gauge; Pressure sensor; Quadrupole mass spectrometer; Residual gas analyzer; Spindt cathode; Vacuum gauge; Vacuum sensor

Indexed keywords

CARBON NANOTUBES; COLD CATHODE TUBES; ELECTRON SOURCES; FIELD EMISSION; FIELD EMISSION DISPLAYS; PRESSURE SENSORS; PRODUCT DESIGN; SEMICONDUCTOR JUNCTIONS; VACUUM GAGES; YARN;

BAYARD-ALPERT GAUGES; COLD CATHODES; COLD EMITTERS; DIAPHRAGM GAUGES; EXTRACTOR GAUGES; FIELD EMITTER; FIELD EMITTER ARRAYS; ION GAUGES; PIRANI GAUGE; QUADRUPOLE MASS SPECTROMETER; RESIDUAL GAS ANALYZERS; SPINDT CATHODES; VACUUM GAUGES; VACUUM SENSORS;

FIELD EMISSION CATHODES;

EID: 84855906427     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2011.08.008     Document Type: Article

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